Experimental verification of a model-based decomposition method for double dipole lithography

2004 ◽  
Author(s):  
Mark Eurlings ◽  
Stephen D. Hsu ◽  
Eric Hendrickx ◽  
Willem op 't Root ◽  
Thomas L. Laidig ◽  
...  
2018 ◽  
Vol 15 (8) ◽  
pp. 1229-1233 ◽  
Author(s):  
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Jianjun Zhu ◽  
Juan M. Lopez-Sanchez ◽  
Changcheng Wang ◽  
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2012 ◽  
Vol 7 (4) ◽  
pp. 044007 ◽  
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Surabi Menon ◽  
Vishal Garg ◽  
Krishna P Singh ◽  
...  

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