Experimental verification of a model-based decomposition method for double dipole lithography
2014 ◽
Vol 27
(4)
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pp. 722-729
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Keyword(s):
2018 ◽
Vol 15
(8)
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pp. 1229-1233
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2012 ◽
Vol 7
(4)
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pp. 044007
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2010 ◽
Vol 195
(10)
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pp. 3166-3175
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2018 ◽
Vol 107
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pp. 396-408
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