Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror
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2017 ◽
Vol 129
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pp. 101-110
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2013 ◽
Vol 28
(2)
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pp. 488-493
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1992 ◽
pp. 621-626
2008 ◽
Vol 19
(12)
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pp. 1276-1284
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1973 ◽
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