Hotspot detection on post-OPC layout using full-chip simulation-based verification tool: a case study with aerial image simulation
Keyword(s):
2017 ◽
Vol 11
(4)
◽
pp. 785-797
◽
Keyword(s):
Keyword(s):
2021 ◽
Vol 787
(1)
◽
pp. 012131
Keyword(s):
Keyword(s):