Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr 0.3 Ti 0.7 )O 3 thin films

2003 ◽  
Author(s):  
Sang-Ouk Ryu ◽  
Seong-Mok Cho ◽  
In-Kyu You ◽  
Sung-Min Yoon ◽  
Kwi-Dong Kim ◽  
...  
1993 ◽  
Author(s):  
Jane W. Maclachlan Spicer ◽  
W. D. Kerns ◽  
Leonard C. Aamodt ◽  
Robert Osiander ◽  
John C. Murphy

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