Deposition of multilayer mirrors with arbitrary period thickness distributions

2004 ◽  
Author(s):  
Thomas Foltyn ◽  
Stefan Braun ◽  
Matthew Moss ◽  
Andreas Leson
Keyword(s):  
Multilayer Mirrors ◽  
Arbitrary Period

Interdiffusion in soft X-ray multilayer mirrors

1996 ◽  
Vol 286 (1-2) ◽  
pp. 176-183 ◽  
Author(s):  
H.L Bai ◽  
E.Y Jiang ◽  
C.D Wang
Keyword(s):  
Multilayer Mirrors ◽  
X Ray

scholarly journals Calibration of multilayer mirrors for the Multi-Spectral Solar Telescope Array II

1995 ◽  
Author(s):  
Charles C. Kankelborg ◽  
James E. Plummer ◽  
Dennis S. Martinez-Galarce ◽  
Ray H. O'Neal ◽  
Craig E. DeForest ◽  
...  
Keyword(s):  
Solar Telescope ◽  
Multilayer Mirrors ◽  
Telescope Array

Plasma treatment for restoration of dielectric multilayer mirrors in short-wavelength free-electron lasers

1995 ◽  
Vol 34 (21) ◽  
pp. 4261 ◽  
Author(s):  
Kawakatsu Yamada ◽  
Tetsuo Yamazaki ◽  
Takashi Shimizu ◽  
Norihiro Sei ◽  
Tomohisa Mikado
Keyword(s):  
Plasma Treatment ◽  
Free Electron ◽  
Short Wavelength ◽  
Free Electron Lasers ◽  
Multilayer Mirrors ◽  
Dielectric Multilayer

Toward the In Situ Remediation of Carbon Deposition on Ru-Capped Multilayer Mirrors Intended for EUV Lithography:  Exploiting the Electron-Induced Chemistry

2007 ◽  
Vol 111 (33) ◽  
pp. 12165-12168 ◽  
Author(s):  
David J. Davis ◽  
Georgios Kyriakou ◽  
Robert B. Grant ◽  
Mintcho S. Tikhov ◽  
Richard M. Lambert
Keyword(s):  
Carbon Deposition ◽  
In Situ Remediation ◽  
Multilayer Mirrors ◽  
Euv Lithography

Soft X-Ray Optics Using Multilayer Mirrors

1985 ◽  
Vol 24 (1) ◽  
Author(s):  
Ping Lee ◽  
Roger J. Bartlett ◽  
Don R. Kania
Keyword(s):  
Multilayer Mirrors ◽  
Ray Optics ◽  
X Ray

Correlation of sidelobe suppression between rugate filters and multilayer mirrors

2007 ◽  
Vol 46 (31) ◽  
pp. 7776 ◽  
Author(s):  
Bicher Haj Ibrahim ◽  
Roelene Botha ◽  
Jean-Eric Bourée ◽  
Pavel Bulkin ◽  
Bernard Drévillon
Keyword(s):  
Sidelobe Suppression ◽  
Multilayer Mirrors

Aging effect of Co/C soft X-ray multilayer mirrors

1997 ◽  
Vol 42 (6) ◽  
pp. 454-457 ◽  
Author(s):  
Haili Bai ◽  
Enyong Jiang ◽  
Renyu Tian ◽  
Cunda Wang
Keyword(s):  
Aging Effect ◽  
Multilayer Mirrors ◽  
X Ray

Structure and scattering properties of Ni_80Nb_20-MgO water-window multilayer mirrors

2003 ◽  
Vol 42 (16) ◽  
pp. 3297
Author(s):  
Satish Vitta ◽  
Martin Weisheit ◽  
Hans-Ulrich Krebs
Keyword(s):  
Multilayer Mirrors ◽  
Water Window

Si adhesion interlayer effects in hydrogen passivated Si/W soft X-ray multilayer mirrors

2006 ◽  
Vol 600 (6) ◽  
pp. 1405-1408 ◽  
Author(s):  
M.J.H. Kessels ◽  
J. Verhoeven ◽  
F.D. Tichelaar ◽  
F. Bijkerk
Keyword(s):  
Multilayer Mirrors ◽  
X Ray
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