Circular RF MEMS resonator solutions for 100-nm to 10-nm SOI structures

2003 ◽  
Author(s):  
Sami K. Myllymaki ◽  
E. Ristolainen ◽  
P. Heino ◽  
A. Lehto ◽  
K. Varjonen
Keyword(s):  
Rf Mems ◽  
Mems Resonator

A Novel Piezoelectric RF-MEMS Resonator with Enhanced Quality Factor

2022 ◽  
Author(s):  
JINCHAO LI ◽  
Zeji Chen ◽  
Wenli Liu ◽  
Jinling Yang ◽  
Yinfang Zhu ◽  
...  
Keyword(s):  
Elastic Waves ◽  
High Frequency ◽  
Rf Mems ◽  
Comprehensive Analysis ◽  
Quality Factors ◽  
Piezoelectric Resonator ◽  
Front End ◽  
Rf Front End ◽  
Mems Resonator ◽  
Compact Size

Abstract This work presents a novel ultra-high frequency (UHF) Lamb mode Aluminum Nitride (AlN) piezoelectric resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether support end, the elastic waves leaking from the tether sidewalls can be reflected, which effectively reduces the anchor loss while retaining size compactness and mechanical robustness. Comprehensive analysis was carried out to provide helpful guidance for obtaining optimal slot designs. For various resonators with frequencies ranging from 630 MHz to 1.97 GHz, promising Q enhancements up to 2 times have all been achieved. The 1.97 GHz resonator implemented excellent f × Q product up to 6.72 × 1012 and low motional resistance down to 340 Ω, which is one of the highest performances among the reported devices. The devices with enhanced Q values as well as compact size could have potential application in advanced RF front end transceivers.

426 Development of RF-MEMS Resonator with MHz Range

2008 ◽  
Vol 2008.8 (0) ◽  
pp. 153-154
Author(s):  
Naoki MATSUZUKA ◽  
Yoshitada ISONO
Keyword(s):  
Rf Mems ◽  
Mems Resonator

High-Band AlN Based RF-MEMS Resonator for TSV Integration

2017 ◽  
Author(s):  
Nan Wang ◽  
Yao Zhu ◽  
Chengliang Sun ◽  
Mingbin Yu ◽  
Gengli Chua ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Resonator ◽  
High Band

An Electronic Modle of Mems Disk Resonator

2012 ◽  
Vol 457-458 ◽  
pp. 278-282
Author(s):  
Ying Qian Jia ◽  
Zheng Ping Zhao
Keyword(s):  
Circuit Design ◽  
Rf Mems ◽  
Mechanical Resonator ◽  
Disk Resonator ◽  
Electrical Equivalent Circuit ◽  
Electric System ◽  
Mems Resonator ◽  
Electrical Analogy ◽  
Electronic Parameters ◽  
Electric Parameters

RF-MEMS resonator can meet the development of communication and attract great attention now. Applied to electric system, mechanical resonator caused some difficulties to the circuit design， the electric parameters should be extracted. Through mechanical-electrical analogy the electronic parameter is extracted and the electrical equivalent circuit established. ANSYS is used to simulate the vibration of the disk. Using the electronic parameters, an oscillator is designed and simulated.

A Novel Ring-shaped Extensional Wine-glass Mode RF-MEMS Resonator with High Quality Factors

2021 ◽  
Author(s):  
Zeji Chen ◽  
Wenli Liu ◽  
Quan Yuan ◽  
Yinfang Zhu ◽  
Jinling Yang ◽  
...  
Keyword(s):  
Rf Mems ◽  
Quality Factors ◽  
High Quality ◽  
Mems Resonator ◽  
Wine Glass
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