A 12–18 GHz electrostatically tunable liquid metal RF MEMS resonator with quality factor of 1400–1840

2011 ◽  
Author(s):  
Wasim Irshad ◽  
Dimitrios Peroulis
Keyword(s):  
Liquid Metal ◽  
Quality Factor ◽  
Rf Mems ◽  
Mems Resonator

A Novel Lamé Mode RF-MEMS Resonator with High Quality Factor

2021 ◽  
pp. 106484
Author(s):  
Zeji Chen ◽  
Tianyun Wang ◽  
Qianqian Jia ◽  
Jinling Yang ◽  
Quan Yuan ◽  
...  
Keyword(s):  
Quality Factor ◽  
Rf Mems ◽  
High Quality Factor ◽  
High Quality ◽  
Mems Resonator

A Novel Piezoelectric RF-MEMS Resonator with Enhanced Quality Factor

2022 ◽  
Author(s):  
JINCHAO LI ◽  
Zeji Chen ◽  
Wenli Liu ◽  
Jinling Yang ◽  
Yinfang Zhu ◽  
...  
Keyword(s):  
Elastic Waves ◽  
High Frequency ◽  
Rf Mems ◽  
Comprehensive Analysis ◽  
Quality Factors ◽  
Piezoelectric Resonator ◽  
Front End ◽  
Rf Front End ◽  
Mems Resonator ◽  
Compact Size

Abstract This work presents a novel ultra-high frequency (UHF) Lamb mode Aluminum Nitride (AlN) piezoelectric resonator with enhanced quality factors (Q). With slots introduced in the vicinity of the tether support end, the elastic waves leaking from the tether sidewalls can be reflected, which effectively reduces the anchor loss while retaining size compactness and mechanical robustness. Comprehensive analysis was carried out to provide helpful guidance for obtaining optimal slot designs. For various resonators with frequencies ranging from 630 MHz to 1.97 GHz, promising Q enhancements up to 2 times have all been achieved. The 1.97 GHz resonator implemented excellent f × Q product up to 6.72 × 1012 and low motional resistance down to 340 Ω, which is one of the highest performances among the reported devices. The devices with enhanced Q values as well as compact size could have potential application in advanced RF front end transceivers.

Effects of slots on thermoelastic quality factor of a vertical beam MEMS resonator

2015 ◽  
Vol 22 (11) ◽  
pp. 2723-2730 ◽  
Author(s):  
Saeid Asadi ◽  
Tahereh Fanaei Sheikholeslami
Keyword(s):  
Quality Factor ◽  
Mems Resonator ◽  
Vertical Beam

426 Development of RF-MEMS Resonator with MHz Range

2008 ◽  
Vol 2008.8 (0) ◽  
pp. 153-154
Author(s):  
Naoki MATSUZUKA ◽  
Yoshitada ISONO
Keyword(s):  
Rf Mems ◽  
Mems Resonator

High-Band AlN Based RF-MEMS Resonator for TSV Integration

2017 ◽  
Author(s):  
Nan Wang ◽  
Yao Zhu ◽  
Chengliang Sun ◽  
Mingbin Yu ◽  
Gengli Chua ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Resonator ◽  
High Band
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