Real-time quantitative imaging for semiconductor crystal growth, control, and characterization

1991 ◽  
Author(s):  
Michael J. Wargo
Keyword(s):  
Crystal Growth ◽  
Real Time ◽  
Quantitative Imaging ◽  
Growth Control ◽  
Semiconductor Crystal

Microstructural investigation of surface roughness in MBE-grown AlAs

1995 ◽  
Vol 53 ◽  
pp. 454-455
Author(s):  
R. Rajesh ◽  
R. Droopad ◽  
C. H. Kuo ◽  
R. W. Carpenter ◽  
G. N. Maracas
Keyword(s):  
Thin Film ◽  
Real Time ◽  
Growth Control ◽  
Native Oxide ◽  
Effusion Cell ◽  
Surface Oxide Layer ◽  
Microstructural Investigation ◽  
Mbe Growth ◽  
Film Substrate ◽  
And Control

Knowledge of material pseudodielectric functions at MBE growth temperatures is essential for achieving in-situ, real time growth control. This allows us to accurately monitor and control thicknesses of the layers during growth. Undesired effusion cell temperature fluctuations during growth can thus be compensated for in real-time by spectroscopic ellipsometry. The accuracy in determining pseudodielectric functions is increased if one does not require applying a structure model to correct for the presence of an unknown surface layer such as a native oxide. Performing these measurements in an MBE reactor on as-grown material gives us this advantage. Thus, a simple three phase model (vacuum/thin film/substrate) can be used to obtain thin film data without uncertainties arising from a surface oxide layer of unknown composition and temperature dependence.In this study, we obtain the pseudodielectric functions of MBE-grown AlAs from growth temperature (650°C) to room temperature (30°C). The profile of the wavelength-dependent function from the ellipsometry data indicated a rough surface after growth of 0.5 μm of AlAs at a substrate temperature of 600°C, which is typical for MBE-growth of GaAs.

Magnet system for providing a forced convection for semiconductor crystal growth under microgravity

1998 ◽  
Author(s):  
Ch. Stenzel ◽  
H. Lenski ◽  
P. Dold ◽  
Th. Kaiser ◽  
K.-W. Benz ◽  
...  
Keyword(s):  
Crystal Growth ◽  
Forced Convection ◽  
Semiconductor Crystal ◽  
Magnet System

scholarly journals A novel reporter for real-time, quantitative imaging of AKT-directed K63-poly-ubiquitination in living cells

Oncotarget ◽  
2018 ◽  
Vol 9 (13) ◽  
pp. 11083-11099
Author(s):  
Shyam Nyati ◽  
Nauman Chaudhry ◽  
Areeb Chatur ◽  
Brandon S. Gregg ◽  
Lauren Kimmel ◽  
...  
Keyword(s):  
Real Time ◽  
Quantitative Imaging ◽  
Living Cells

Direct quantitative imaging of the writing stage in a photosensitive azopolymer by digital holography

Soft Matter ◽  
2019 ◽  
Vol 15 (39) ◽  
pp. 7809-7813 ◽  
Author(s):  
V. Pagliarulo ◽  
A. Calabuig ◽  
S. Grilli ◽  
P. Ferraro
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Surface Relief ◽  
Digital Holography ◽  
Light Exposure ◽  
Quantitative Imaging ◽  
Continuous Light ◽  
Full Field ◽  
Surface Relief Grating

In this paper, we demonstrated that the gradual formation of a surface relief grating (SRG) in azopolymer thin films under continuous light exposure could be directly observed in situ and in real-time, allowing full-field characterization.

scholarly journals Semiconductor Crystal Growth under the Influence of Magnetic Fields

2019 ◽  
Vol 55 (2) ◽  
pp. 1900115
Author(s):  
Christiane Frank-Rotsch ◽  
Natasha Dropka ◽  
Frank-Michael Kießling ◽  
Peter Rudolph
Keyword(s):  
Crystal Growth ◽  
Magnetic Fields ◽  
Semiconductor Crystal
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