Negative resist image by dry etching as a novel top surface imaging process for ion-beam lithography

2003 ◽  
Author(s):  
Khalil I. Arshak ◽  
Miroslav Mihov ◽  
Arousian Arshak ◽  
Declan McDonagh ◽  
David Sutton ◽  
...  
Keyword(s):  
Ion Beam ◽  
Dry Etching ◽  
Surface Imaging ◽  
Ion Beam Lithography ◽  
Top Surface Imaging

Novel surface imaging process with ion-beam lithography and dry development

1992 ◽  
Author(s):  
Ulrich A. Jagdhold ◽  
Wolfgang Pilz ◽  
L. M. Buchmann ◽  
M. Torkler
Keyword(s):  
Ion Beam ◽  
Surface Imaging ◽  
Ion Beam Lithography

Submicrometer Structures Fabricated by Masked Ion Beam Lithography and Dry Etching

1988 ◽  
Vol 135 (6) ◽  
pp. 1526-1529
Author(s):  
S. W. Pang ◽  
W. D. Goodhue ◽  
M. W. Geis
Keyword(s):  
Ion Beam ◽  
Dry Etching ◽  
Ion Beam Lithography

scholarly journals Ion-beam lithography by use of highly charged Ar-ion beam

2006 ◽  
Vol 77 (3) ◽  
pp. 03C111 ◽  
Author(s):  
Sadao Momota ◽  
Shingo Iwamitsu ◽  
Shougo Goto ◽  
Yoichi Nojiri ◽  
Jun Taniguchi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography

Large-Scale Focused Helium Ion Beam Lithography

2021 ◽  
Vol 31 (5) ◽  
pp. 1-4
Author(s):  
Jay C. LeFebvre ◽  
Shane A. Cybart
Keyword(s):  
Large Scale ◽  
Ion Beam ◽  
Ion Beam Lithography ◽  
Helium Ion

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

2012 ◽  
Vol 272 ◽  
pp. 149-152 ◽  
Author(s):  
Nitipon Puttaraksa ◽  
Somrit Unai ◽  
Michael W. Rhodes ◽  
Kanda Singkarat ◽  
Harry J. Whitlow ◽  
...  
Keyword(s):  
Soft Lithography ◽  
Ion Beam ◽  
Master Mold ◽  
Ion Beam Lithography

Maskless ion beam lithography system

1999 ◽  
Vol 46 (1-4) ◽  
pp. 469-472 ◽  
Author(s):  
Y. Lee ◽  
R.A. Gough ◽  
T.J. King ◽  
Q. Ji ◽  
K.N. Leung ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography ◽  
Lithography System
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