Comparative evaluation of e-beam sensitive chemically amplified resists for mask making

2002 ◽  
Author(s):  
Mathias Irmscher ◽  
Dirk Beyer ◽  
Joerg Butschke ◽  
Chris Constantine ◽  
Thomas Hoffmann ◽  
...  
Keyword(s):  
Comparative Evaluation ◽  
Chemically Amplified ◽  
Mask Making ◽  
Chemically Amplified Resists

Investigation of e-beam sensitive negative-tone chemically amplified resists for binary mask making

2003 ◽  
Author(s):  
Mathias Irmscher ◽  
Lothar Berger ◽  
Dirk Beyer ◽  
Joerg Butschke ◽  
Peter Dress ◽  
...  
Keyword(s):  
Binary Mask ◽  
Chemically Amplified ◽  
Mask Making ◽  
Negative Tone ◽  
Chemically Amplified Resists

Heating effect of the radiation chemistry of polyhydroxystyrene-type chemically amplified resists

2020 ◽  
Vol 59 (8) ◽  
pp. 086506
Author(s):  
Yuta Ikari ◽  
Kazumasa Okamoto ◽  
Akihiro Konda ◽  
Takahiro Kozawa ◽  
Takao Tamura
Keyword(s):  
Radiation Chemistry ◽  
Heating Effect ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Characterizing acid diffusion lengths in chemically amplified resists from measurements of deprotection kinetics

2014 ◽  
Vol 13 (4) ◽  
pp. 043017 ◽  
Author(s):  
Abhijit A. Patil ◽  
Yogendra Narayan Pandey ◽  
Manolis Doxastakis ◽  
Gila E. Stein
Keyword(s):  
Acid Diffusion ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Design and Lithographic Characteristics of Alicyclic Fluoropolymer for ArF Chemically Amplified Resists

2006 ◽  
Vol 45 (No. 46) ◽  
pp. L1230-L1231
Author(s):  
Katsumi Maeda ◽  
Kaichiro Nakano ◽  
Masamitsu Shirai
Keyword(s):  
Chemically Amplified ◽  
Chemically Amplified Resists

6-inch circle template fabrication for patterned media using a conventional resist and new chemically amplified resists

2009 ◽  
Author(s):  
Morihisa Hoga ◽  
Masaharu Fukuda ◽  
Tsuyoshi Chiba ◽  
Mikio Ishikawa ◽  
Kimio Itoh ◽  
...  
Keyword(s):  
Patterned Media ◽  
Chemically Amplified ◽  
Chemically Amplified Resists

Hexafluoroisopropyl and trifluoromethyl carbinols in an acrylate platform for 157-nm chemically amplified resists

2004 ◽  
Author(s):  
Vladimir Jakubek ◽  
Eric A. Robertson III ◽  
Atteye H. Abdourazak ◽  
Thomas J. Markley ◽  
John A. Marsella ◽  
...  
Keyword(s):  
Chemically Amplified ◽  
Chemically Amplified Resists
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