VUV spectroscopy of nominally pure and rare-earth ions doped LiCaAIF 6 single crystals as promising materials for 157 nm photolithography
2005 ◽
Vol 543
(1)
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pp. 229-233
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1986 ◽
Vol 122
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pp. 35-45
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2013 ◽
Vol 382
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pp. 94-95
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2009 ◽
Vol 131
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pp. 034505
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1993 ◽
Vol 32
(S3)
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pp. 608
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1997 ◽
Vol 52
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pp. 449-452
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Keyword(s):
2013 ◽
Vol 362
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pp. 343-348
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