Long-term laser durability testing of optical coatings and thin films for 157-nm lithography

Author(s):  
Vladimir Liberman ◽  
Mordechai Rothschild ◽  
Stephen T. Palmacci ◽  
N. N. Efremow, Jr. ◽  
Jan H. C. Sedlacek ◽  
...  
RSC Advances ◽  
2018 ◽  
Vol 8 (37) ◽  
pp. 20990-20995 ◽  
Author(s):  
Xiang Yang ◽  
Shu Jiang ◽  
Jun Li ◽  
Jian-Hua Zhang ◽  
Xi-Feng Li

In this paper, W-doped ZnSnO (WZTO) thin films and TFT devices are successfully fabricated by a wet-solution technique.


MRS Advances ◽  
2016 ◽  
Vol 1 (22) ◽  
pp. 1631-1636 ◽  
Author(s):  
Boya Cui ◽  
D. Bruce Buchholz ◽  
Li Zeng ◽  
Michael Bedzyk ◽  
Robert P. H. Chang ◽  
...  

ABSTRACTThe cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.


2020 ◽  
Vol 2 (1) ◽  
pp. 3
Author(s):  
Katerina Lazarova ◽  
Silviya Boycheva ◽  
Marina Vasileva ◽  
Denitza Zgureva ◽  
Tsvetanka Babeva

In this study, solid waste from coal combustion in thermal power plants (TPPs) was used for the synthesis of zeolite Na-X samples. They were prepared by the long-term alkaline atmospheric conversion of coal ash collected from the electrostatic precipitators in the TPP “AES Galabovo”. When used in the form of thin films/layers, the optical detection of volatile organic compounds (VOCs) is possible due to a change in their reflectance spectra and color. In order to improve the sensing properties of synthesized zeolites, they were wet milled for 60 s and both milled and unmilled zeolites were used as dopants for the niobium oxide matrix in the form of thin films deposited by the spin-coating method on a silicon substrate. The surface morphology and structure of both zeolite powders were studied by scanning electron microscopy, while their size was determined by dynamic light scattering (DLS) spectra. Optical constants (refractive index, n, and extinction coefficient, k) and the thickness of the films were calculated from reflectance measurements. The change in the reflection coefficient ∆R of the films was determined from measured reflectance spectra prior to and after exposure to probe acetone molecules. An increase in the reaction of the films with milled zeolites to acetone, compared to the samples with unmilled zeolites, is demonstrated.


1997 ◽  
Vol 12 (3) ◽  
pp. 651-656 ◽  
Author(s):  
P. K. Nair ◽  
L. Huang ◽  
M. T. S. Nair ◽  
Hailin Hu ◽  
E. A. Meyers ◽  
...  

Formation of the ternary compound Cu3BiS3 during annealing of chemically deposited CuS (∼0.3 μm) films on Bi2S3 film (∼0.1 μm on glass substrate) is reported. The interfacial atomic diffusion leading to the formation of the compound during the annealing is indicated in x-ray photoelectron depth profile spectra of the films. The formation of Cu3BiS3 (Wittichenite, JCPDS 9-488) is confirmed by the x-ray diffraction (XRD) patterns. The films are optically absorbing in the entire visible region (absorption coefficient 4 × 104 cm−1 at 2.48 eV or 0.50 μm) and are p-type with electrical conductivity of 102−103 Ω−1 cm−1. Potential applications of these films as optical coatings in the control of solar energy transmittance through glazings and as a p-type absorber film in solar cell structures are indicated.


1980 ◽  
Vol 7 (1-3) ◽  
pp. 171-179
Author(s):  
J. Griessing

There is a striking dependence of the evaporation deposition geometry (i.e. angular distribution of the incident vapor beam) on the properties of deposited conductive films. This paper discusses solderability, adhesion and long-term stability of adhesion of Ti-Pd-Au, Ti-Au and Ti-Cu films. In all cases the above properties were improved by an evaporation deposition geometry with steep angles of the incident vapor beam.


1998 ◽  
Vol 31 ◽  
pp. 111
Author(s):  
P.S. Walker ◽  
G.W. Blunn ◽  
J. Perry ◽  
C.J. Bell ◽  
P. Campbell ◽  
...  

2018 ◽  
Vol 70 (4) ◽  
pp. 639-644 ◽  
Author(s):  
Kwang-Hua R. Chu

Purpose During the operation of Wendelstein 7-X (W7-X), any mechanical disturbance such as stick-slip may cause quenching of superconducting (SC) coils. The friction behavior of MoS2 lubrication (thin film) for narrow support elements between the SC coils in W7-X is rather important, as there is a design requirement for a coefficient of friction (COF) 0.05 between the sliding surfaces to control the stress contribution (from friction). Design/methodology/approach The author has carried out intensive calibrations or verifications using verified models considering previous friction tests on various samples which measured the COF in 4.2 K, 77 K and room temperature conditions (at high vacuum) to simulate the actual working condition. Findings The author has given useful explanations and diagnosis for previous anomalous scattered data. To improve the performance of MoS2, the author has predicted its better COF (0.002 via tuning of the activation volume), which could be a superlubricating state for MoS2 thin films considering the long-term operation requirement W7-X. Originality/value In this paper, the author has adopted Eyring’s approach to predict the low COF (0.002 via tuning of the activation volume), which could be a superlubricating state for MoS2 thin films considering the long-term operation requirement W7-X. Finally, some recent progresses about the possible few-layer MoS2 role in the electromagnetic loads have been provided.


2017 ◽  
Author(s):  
Martina Brülisauer ◽  
Emine Çağin ◽  
Dietmar Bertsch ◽  
Stefan Lüthi ◽  
Klaus Dietrich ◽  
...  
Keyword(s):  

2020 ◽  
Vol 8 (9) ◽  
pp. 3010-3016 ◽  
Author(s):  
Chunhua Su ◽  
Meijia Qiu ◽  
Yipeng An ◽  
Siyuan Sun ◽  
Chuanxi Zhao ◽  
...  

Long-term stable, fast switching α-Ni(OH)2 electrodes for electrochromic energy storage application has been fabricated by one-step preheating treatment. The cost-effective fabrication is expected to expand to other metal hydroxide materials.


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