Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies

2002 ◽  
Author(s):  
Henryk Fiedorowicz ◽  
Andrzej Bartnik ◽  
Roman Jarocki ◽  
Jerzy Kostecki ◽  
Rafal Rakowski ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Radiation ◽  
X Ray ◽  
Euv Lithography ◽  
Radiation Sources

Characterization of multilayer x-ray mirrors for the λ ⋍ 19 nm range using a laser-plasma radiation source

1993 ◽  
Vol 23 (1) ◽  
pp. 76-80 ◽  
Author(s):  
I A Zhitnik ◽  
S V Kuzin ◽  
M M Mitropol'skiĭ ◽  
Evgenii N Ragozin ◽  
V A Slemzin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Nm Range

Soft x-ray (0.2

2004 ◽  
Vol 75 (10) ◽  
pp. 4026-4028 ◽  
Author(s):  
B. H. Failor ◽  
N. Qi ◽  
J. S. Levine ◽  
H. Sze ◽  
E. M. Gullickson
Keyword(s):  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Radiation Sources ◽  
Z Pinch

Micromachining of organic polymers by X-ray photo-etching using a 10Hz laser-plasma radiation source

2005 ◽  
Vol 78-79 ◽  
pp. 452-456 ◽  
Author(s):  
A. Bartnik ◽  
H. Fiedorowicz ◽  
R. Jarocki ◽  
L. Juha ◽  
J. Kostecki ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Organic Polymers ◽  
X Ray

Strong temperature effect on X-ray photo-etching of polytetrafluoroethylene using a 10 Hz laser-plasma radiation source based on a gas puff target

2006 ◽  
Vol 82 (4) ◽  
pp. 529-532 ◽  
Author(s):  
A. Bartnik ◽  
H. Fiedorowicz ◽  
R. Jarocki ◽  
L. Juha ◽  
J. Kostecki ◽  
...  
Keyword(s):  
Temperature Effect ◽  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray

Measurements of reflection spectra of soft X-ray multilayer mirrors using a broadband laser-plasma radiation source

2009 ◽  
Vol 39 (5) ◽  
pp. 474-480 ◽  
Author(s):  
E A Vishnyakov ◽  
Konstantin N Mednikov ◽  
A A Pertsov ◽  
Evgenii N Ragozin ◽  
A A Reva ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Reflection Spectra ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Broadband Laser

Reflective soft x-ray microscope for the investigation of objects illuminated by laser-plasma radiation

1995 ◽  
Vol 25 (9) ◽  
pp. 919-922 ◽  
Author(s):  
I A Artyukov ◽  
V E Asadchikov ◽  
Aleksandr V Vinogradov ◽  
Yu S Kas'yanov ◽  
V V Kondratenko ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Radiation ◽  
X Ray

Spectroscopic characterization of soft x-ray multilayer optics using a broadband laser-plasma radiation source

1997 ◽  
Author(s):  
Eugene N. Ragozin ◽  
Nikolai N. Kolachevsky ◽  
Mikhail M. Mitropolsky ◽  
Yurii Y. Pokrovsky
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Spectroscopic Characterization ◽  
Plasma Radiation ◽  
X Ray ◽  
Broadband Laser

High resolution x-ray absorption spectroscopy using a laser plasma radiation source

2004 ◽  
Vol 75 (11) ◽  
pp. 4606-4609 ◽  
Author(s):  
Ulrich Vogt ◽  
Thomas Wilhein ◽  
Holger Stiel ◽  
Herbert Legall
Keyword(s):  
High Resolution ◽  
Absorption Spectroscopy ◽  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
X Ray Absorption
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