Spectroscopic characterization of soft x-ray multilayer optics using a broadband laser-plasma radiation source
Keyword(s):
X Ray
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1993 ◽
Vol 23
(1)
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pp. 76-80
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Micromachining of organic polymers by X-ray photo-etching using a 10Hz laser-plasma radiation source
2005 ◽
Vol 78-79
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pp. 452-456
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Keyword(s):
2010 ◽
Vol 65
(1)
◽
pp. 90-94
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2017 ◽
Vol 47
(6)
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pp. 208-214
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