Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
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2020 ◽
Vol 580
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pp. 119223
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2009 ◽
Vol 84
(12)
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pp. 2206-2213
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2008 ◽
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1996 ◽
Vol 67
(2)
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pp. 133-140
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