Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile

2002 ◽  
Author(s):  
Osami Sasaki ◽  
Kunihiro Honma ◽  
Takamasa Suzuki
2020 ◽  
Vol 580 ◽  
pp. 119223 ◽  
Author(s):  
Lajos Madarász ◽  
Ákos Köte ◽  
Martin Gyürkés ◽  
Attila Farkas ◽  
Bence Hambalkó ◽  
...  

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