Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control
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2002 ◽
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2020 ◽
Vol 580
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pp. 119223
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2009 ◽
Vol 84
(12)
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pp. 2206-2213
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2008 ◽
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1996 ◽
Vol 67
(2)
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pp. 133-140
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