2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers

2002 ◽  
Author(s):  
V. J. Logeeswaran ◽  
Francis E. Tay ◽  
M. L. Chan ◽  
Fook S. Chau ◽  
Yung C. Liang
Keyword(s):  
Resonant Frequency ◽  
Q Factor

scholarly journals A digital system for measurement of resonant frequency and Q factor

1982 ◽  
Vol IM-31 (1) ◽  
pp. 18-21 ◽  
Author(s):  
Rajani K. Pandrangi ◽  
Stanislaw S. Stuchly ◽  
Mariusz Barski
Keyword(s):  
Resonant Frequency ◽  
Digital System ◽  
Q Factor

scholarly journals A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 658 ◽  
Author(s):  
Víctor Ruiz-Díez ◽  
Javier Toledo ◽  
Jorge Hernando-García ◽  
Abdallah Ababneh ◽  
Helmut Seidel ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Quality Factor ◽  
Q Factor ◽  
Liquid Media ◽  
Roof Tile ◽  
Aln Film ◽  
Monitoring Applications ◽  
Media Monitoring ◽  
Comprehensive Study

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm3 cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10−6 g/mL and 10−4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

A resonant frequency retrieving method for low Q-factor materials based on resonant ultrasound spectroscopy

Ultrasonics ◽  
2019 ◽  
Vol 99 ◽  
pp. 105971
Author(s):  
Qiang Zhang ◽  
Fan Fan ◽  
Rui Wang ◽  
Haijun Niu ◽  
Pascal Laugier
Keyword(s):  
Resonant Frequency ◽  
Q Factor ◽  
Resonant Ultrasound Spectroscopy ◽  
Resonant Ultrasound

Q-Factor Improving of Film Bulk Acoustic Wave Resonator for Chip-Scale Atomic Clocks

2015 ◽  
Vol 645-646 ◽  
pp. 509-512 ◽  
Author(s):  
Zhong Shan Zhang ◽  
Liang Tang ◽  
Lei Ji
Keyword(s):  
Acoustic Wave ◽  
Resonant Frequency ◽  
Piezoelectric Layer ◽  
Bulk Acoustic Wave ◽  
Atomic Clocks ◽  
Q Factor ◽  
Silicon Oxide Layer ◽  
Electrode Layer ◽  
Composite Support ◽  
Film Bulk

Film bulk acoustic wave resonators (FBARs) with relatively high Q-factor are considered good candidates to be used in the RF module of chip-scale atomic clocks (CSACs). In order to simulate and analyze the resonant properties, the Mason equivalent circuit of the FBAR device is introduced, which consists of five parts including top electrode layer, low temperature silicon oxide layer, piezoelectric layer, bottom electrode layer and a composite support structure layer. With the practical processing conditions considered, the piezoelectric layer with a reasonable thickness of 1.30um is selected to achieve a FBAR device with resonant frequency 4.60GHz and Q-factor 278 by the simulation and analysis. In order to further improve the Q-factor, SiO2 thin films with thicknesses from 0.10um to 0.50um placed between the top electrode and piezoelectric layer are introduced. However, as the SiO2 thin film is introduced, the resonant frequency of the FBAR device will drop. In order to keep the resonant frequency fixed to 4.60GHz, the thickness of the piezoelectric layer is adjusted. Finally, the FBAR device resonating at 4.60GHz with Q-factor 627 is achieved, the thicknesses of the SiO2 film and piezoelectric layer of which are 0.20um and 0.69um respectively. The Q-factor of the FBAR device improves about 350, and the FBAR device is expected to be used in CSACs.

scholarly journals Influence of Temperature Variation on the Vibrational Characteristics of Fused Silica Cylindrical Resonators for Coriolis Vibratory Gyroscopes

Sensors ◽  
2020 ◽  
Vol 20 (4) ◽  
pp. 1032
Author(s):  
Pengbo Xiao ◽  
Zhinan Qiu ◽  
Yiming Luo ◽  
Yao Pan ◽  
Tianliang Qu ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Temperature Variation ◽  
Fused Silica ◽  
Q Factor ◽  
Temperature Drift ◽  
Cylindrical Resonator ◽  
Influence Of Temperature ◽  
Vibratory Gyroscopes ◽  
Frequency Mismatch ◽  
Vibrational Characteristics

The fused silica cylindrical resonator is a type of axisymmetric resonator that can be used for Coriolis vibratory gyroscopes. Although the resonant frequency, frequency mismatch, and Q factor are natural properties of the resonator, they can change with temperature. Therefore, the temperature drift severely limits the detection accuracy and bias stability of the gyroscope. In this paper, the influence of temperature variation on the vibrational characteristics of fused silica cylindrical resonators was investigated. Experiments were performed on a fused silica cylindrical resonator coated with Cr/Au films. It was shown that at the temperature range from 253.15 K to 353.15 K, the resonant frequency linearly increased with temperature, the frequency mismatch remained unchanged, and the Q factor gradually increased till about 333.15 K, when it began to decrease. Meanwhile, the change of thermoelastic damping with temperature may dominate the variation of Q factor at the temperature range from 253.15 K to 353.15 K. This phenomenon was theoretically analyzed and the variation trends of results were consistent with the theoretical analysis. This study indicates that, for the fused silica cylindrical resonator, to discover the influence of temperature variation on the resonant frequency, frequency mismatch, and Q factor, there are certain rules to follow and repeat. The relationship between temperature and frequency can be established, which provides the feasibility of using self-calibration based on temperature characteristics of the resonator for temperature drift compensations. Additionally, there is an optimum temperature that may improve the performance of the Coriolis vibratory gyroscope with the fused silica cylindrical resonator.

scholarly journals Contactless Readout of Passive LC Sensors with Compensation Circuit for Distance-Independent Measurements

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 842 ◽  
Author(s):  
Marco Baù ◽  
Marco Demori ◽  
Marco Ferrari ◽  
Vittorio Ferrari
Keyword(s):  
Numerical Analysis ◽  
Resonant Frequency ◽  
Measurement Accuracy ◽  
Electronic Circuit ◽  
Experimental Tests ◽  
Experimental Results ◽  
Q Factor ◽  
Capacitance Sensor ◽  
Compensation Circuit ◽  
Lc Sensors

Contactless readout of passive LC sensors composed of a capacitance sensor connected to a coil can be performed through an electromagnetically coupled readout coil set at distance d. Resonant frequency fs and Q-factor QS of the LC sensor can be extracted from the measurement of the impedance at the readout coil by using a technique theoretically independent of d. This work investigates the effects on the measurement accuracy due to the unavoidable parasitic capacitance CP in parallel to the readout coil, which makes the measured values of fs and QS dependent on d. Numerical analysis and experimental tests confirm such dependence. To overcome this limitation, a novel electronic circuit topology for the compensation of CP is proposed. The experimental results on assembled prototypes show that for a LC sensor with fs ≈ 5.48 MHz a variation of less than 200 ppm across an interrogation distance between 2 and 18 mm is achieved with the proposed compensation circuit.

A modified model of helical resonator with predictable loaded resonant frequency and Q-factor

2014 ◽  
Vol 85 (10) ◽  
pp. 104706 ◽  
Author(s):  
K. Deng ◽  
Y. L. Sun ◽  
W. H. Yuan ◽  
Z. T. Xu ◽  
J. Zhang ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Q Factor ◽  
Modified Model
Sign in / Sign up

Export Citation Format

Share Document