High-precision 2D angle measurement using fringe analysis techniques

2001 ◽  
Author(s):  
Zongtao Ge ◽  
Takayuki Saito ◽  
Shinichi Matsuda ◽  
Mitsuo Takeda
Keyword(s):  
High Precision ◽  
Angle Measurement ◽  
Fringe Analysis ◽  
Analysis Techniques

Advanced Fringe Analysis Techniques in Circuit Edit

2006 ◽  
Author(s):  
R.K. Jain ◽  
T. Malik ◽  
T.R. Lundquist ◽  
C.-C. Tsao ◽  
W.J. Walecki
Keyword(s):  
Imaging System ◽  
Success Rates ◽  
Endpoint Detection ◽  
Fringe Analysis ◽  
Analysis Techniques ◽  
Aspect Ratios ◽  
Slope Correction ◽  
Trench Area ◽  
And Control ◽  
Thickness Measurements

Abstract Novel Fabry Perot [1] fringe analysis techniques for monitoring the etching process with a coaxial photon-ion column [2] in the Credence OptiFIB are reported. Presently the primary application of these techniques in circuit edit is in trenching either from the front side or from the backside of a device. Optical fringes are observed in reflection geometry through the imaging system when the trench floor is thin and semi-transparent. The observed fringes result from optical interference in the etalon formed between the trench floor (Si in the case of backside trenching) and the circuitry layer beyond the trench floor. In-situ real-time thickness measurements and slope correction techniques are proposed that improve endpoint detection and control planarity of the trench floor. For successful through silicon edits, reliable endpoint detection and co-planarity of a local trench is important. Reliable endpoint detection prevents milling through bulk silicon and damaging active circuitry. Uneven trench floor thickness results in premature endpoint detection with sufficient thickness remaining in only part of the trench area. Good co-planarity of the trench floor also minimizes variability in the aspect ratios of the edit holes, hence increasing success rates in circuit edit.

scholarly journals Analytical Overview of Works on High Precision Angle Measurement Instruments

2014 ◽  
Vol 2014 (7) ◽  
pp. 53-59
Author(s):  
E Bezvesilna ◽  
◽  
Y Kyrychuk ◽  
S Nechai ◽  
R Bychuk
Keyword(s):  
High Precision ◽  
Angle Measurement ◽  
Measurement Instruments

A high-precision roll angle measurement method

Optik ◽  
2015 ◽  
Vol 126 (24) ◽  
pp. 4837-4840 ◽  
Author(s):  
Zhai Yusheng ◽  
Zhang Zhifeng ◽  
Su Yuling ◽  
Wang Xinjie ◽  
Feng Qibo
Keyword(s):  
High Precision ◽  
Measurement Method ◽  
Angle Measurement ◽  
Roll Angle

Analysis of Synchronization Angle Precision in RCS Measurement and its High Speed Synchronous Pulse Implementation

2013 ◽  
Vol 303-306 ◽  
pp. 493-497
Author(s):  
Dong Chen ◽  
Hua Pei Wang ◽  
Qing Guo
Keyword(s):  
Mathematical Model ◽  
Cross Section ◽  
High Precision ◽  
High Speed ◽  
Radar Cross Section ◽  
Angle Measurement ◽  
Precision Measurements ◽  
Fixed Angle ◽  
Synchronous Pulse ◽  
Angle Interval

To meet the demand for high precision measurements of radar cross section (RCS) in microwave anechoic chamber, the effect of angle repeatability of position servo system in background cancellation technology is analyzed and its error mathematical model is presented. Then a method of high speed synchronization angle measurement based on CPLD is proposed, which improves the precision of synchronization angle measurement in any fixed angle interval. The experiment results show that this method can effectively solve the accuracy of target RCS when rotating.

Dynamic investigations of opto-mechanical properties of iPP/TiO2 nanocomposites fibres using fringe analysis techniques

Optik ◽  
2020 ◽  
Vol 212 ◽  
pp. 164683
Author(s):  
T.Z.N. Sokkar ◽  
M.A. El-Bakary ◽  
M.I. Raslan ◽  
N.A. AL-kalali ◽  
E.Z. Omar
Keyword(s):  
Mechanical Properties ◽  
Fringe Analysis ◽  
Analysis Techniques

A novel instrument for high precision angle measurement of optical axes

Optik ◽  
2013 ◽  
Vol 124 (12) ◽  
pp. 1132-1135 ◽  
Author(s):  
Ruimin Liu ◽  
Xiqing Guo ◽  
Jin Yu ◽  
Yingying Qin ◽  
Qiang Bian ◽  
...  
Keyword(s):  
High Precision ◽  
Angle Measurement ◽  
Optical Axes

scholarly journals STUDY OF EXCITED NUCLEONS AND THEIR STRUCTURE

2014 ◽  
Vol 26 ◽  
pp. 1460050 ◽  
Author(s):  
VOLKER D. BURKERT
Keyword(s):  
Lattice Qcd ◽  
Partial Wave ◽  
Excitation Spectrum ◽  
High Precision ◽  
Meson Production ◽  
Partial Wave Analysis ◽  
Production Data ◽  
Wave Analysis ◽  
Analysis Techniques ◽  
Recent Advances

Recent advances in the study of excited nucleons are discussed. Much of the progress has been achieved due to the availability of high precision meson production data in the photoproduction and electroproduction sectors, the development of multi-channel partial wave analysis techniques, and advances in Lattice QCD with predictions of the full excitation spectrum.

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