Single-crystal silicon MEMS microactuator for high-density hard disk drive
Keyword(s):
2003 ◽
Vol 108
(1-3)
◽
pp. 59-63
◽
Keyword(s):
Keyword(s):
2005 ◽
Keyword(s):
Keyword(s):
2005 ◽
Vol 44
(42)
◽
pp. 6934-6937
◽
Keyword(s):
Keyword(s):
2004 ◽
Vol 14
(12)
◽
pp. 1608-1613
◽
Keyword(s):
Keyword(s):
Keyword(s):