Single-crystal silicon MEMS microactuator for high-density hard disk drive

Author(s):  
Jianqiang Mou ◽  
Shixin Chen ◽  
Yi Lu
2003 ◽  
Vol 108 (1-3) ◽  
pp. 59-63 ◽  
Author(s):  
J.Q. Mou ◽  
Y. Lu ◽  
J.P. Yang ◽  
Q.H. Li

Frequenz ◽  
2013 ◽  
Vol 67 (7-8) ◽  
Author(s):  
Krisada Prachumrasee ◽  
Arkom Kaewrawang ◽  
Anan Kruesubthaworn ◽  
Roong Sivaratana ◽  
Apirat Siritaratiwat

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