High-average-power narrow-band KrF excimer laser

1991 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Masahiko Kowaka ◽  
Yukio Kobayashi
Keyword(s):  
Excimer Laser ◽  
Narrow Band ◽  
Average Power ◽  
High Average Power ◽  
Krf Excimer Laser

High-average-power femtosecond KrF excimer laser

2001 ◽  
Vol 7 (4) ◽  
pp. 551-558 ◽  
Author(s):  
Y. Nabekawa ◽  
D. Yoshitomi ◽  
T. Sekikawa ◽  
S. Watanabe
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
High Average Power ◽  
Krf Excimer Laser

Study of high-average-power excimer laser with circulation loop

1991 ◽  
Author(s):  
Bruno Godard ◽  
Emmanuel Estocq ◽  
Marc X. Stehle ◽  
Jean C. Bonnet ◽  
Daniel R. Pigache
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
Circulation Loop ◽  
High Average Power

Limitations of a high average power excimer laser by acoustic or shock waves

1990 ◽  
Author(s):  
M. Bessafi ◽  
P. Canarelli ◽  
B. L. Fontaine ◽  
B. M. Forestier ◽  
Ph. C. Delaporte ◽  
...  
Keyword(s):  
Shock Waves ◽  
Excimer Laser ◽  
Average Power ◽  
High Average Power

A high average power excimer laser

1983 ◽  
Author(s):  
Robert R. Butcher ◽  
Roger A. Tennant ◽  
George F. Erickson ◽  
Steven L. Swisher ◽  
Walter L. Willis ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Average Power ◽  
High Average Power

Optical fiber transmission of a high-average-power excimer laser

1998 ◽  
Author(s):  
A. S. Gouillon ◽  
Alexandre Gatto ◽  
Philippe C. Delaporte ◽  
Bernard L. Fontaine ◽  
Marc L. Sentis ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Excimer Laser ◽  
Average Power ◽  
Optical Fiber Transmission ◽  
High Average Power ◽  
Fiber Transmission

Coherent Imaging with a Narrow-band High Average Power XUV Source

2014 ◽  
Author(s):  
Michael Zürch ◽  
Jan Rothhardt ◽  
Steffen Hädrich ◽  
Stefan Demmler ◽  
Manuel Krebs ◽  
...  
Keyword(s):  
Narrow Band ◽  
Average Power ◽  
High Average Power ◽  
Coherent Imaging
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