Synchrotron light source and microlithography in Hefei National Synchrotron Radiation Laboratory

2001 ◽  
Author(s):  
Congliang Guo ◽  
Siyuan Huang ◽  
Yingui Zhou ◽  
Shinan Qian
Author(s):  
L. Liu ◽  
R. T. Neuenschwander ◽  
A. R. D. Rodrigues

The development of synchrotron radiation sources in Brazil is described from a brief historical point of view followed by a description of the Sirius project, a new 3 GeV fourth-generation synchrotron light source with 518 m circumference and 0.25 nm.rad emittance, in final construction stage at the Brazilian Synchrotron Light Laboratory campus, in Campinas. As one of the pioneer fourth-generation machines, many accelerator engineering challenges were studied in depth and resulted in quite a few innovative developments. In this paper, we review some of these developments. This article is part of the theme issue ‘Fifty years of synchrotron science: achievements and opportunities’.


2010 ◽  
Vol 1 (MEDSI-6) ◽  
Author(s):  
L. Doom ◽  
B. Gash ◽  
M. Hussain ◽  
P. Job ◽  
B. Kosciuk ◽  
...  

National Synchrotron Light Source II (NSLS-II) will be a 3-GeV, 792-m circumference third-generation synchrotron radiation facility with ultralow emittance and extremely high brightness. Front ends are required to transmit synchrotron radiation from the storage ring to the beam line while providing equipment and personnel protection. There will be up to 57 front ends in the NSLS-II facility with six in the baseline. Original designs are being developed and will be manufactured for three non-canted in-vacuum undulators, one canted in-vacuum undulator, one elliptically polarized undulator and one damping wiggler. Bending magnet and three-pole wiggler front ends are also being designed. Power densities range from 0.3 to 89.8 kW mrad−2, with total powers ranging from 0.34 to 64.5 kW. All components intercepting synchrotron radiation are water cooled and were analysed to confirm acceptable thermal limits.


COSMOS ◽  
2007 ◽  
Vol 03 (01) ◽  
pp. 79-88
Author(s):  
A. CHEN ◽  
G. LIU ◽  
L. K. JIAN ◽  
HERBERT O. MOSER

X-ray lithography with synchrotron radiation is an important nanolithographic tool which has unique advantages in the production of high aspect ratio nanostructures. The optimum synchrotron radiation spectrum for nanometer scale X-ray lithography is normally in the range of 500 eV to 2 keV. In this paper, we present the main methods, equipment, process parameters and preliminary results of nanofabrication by proximity X-ray lithography within the nanomanufacturing program pursued by Singapore Synchrotron Light Source (SSLS). Nanostructures with feature sizes down to 200 nm and an aspect ratio up to 10 have been successfully achieved by this approach.


2021 ◽  
pp. 99-105
Author(s):  
Antonina Smygacheva ◽  
Vladimir Korchuganov ◽  
Evgenii Fomin

The Project of complete modernization of a current accelerator complex and the making of the 3-d generation light source is in progress in the NRC «Kurchatov Institute». A new booster synchrotron is part of the injection complex for a new synchrotron light source. It must ensure reliable and stable operation of the upgraded main storage ring. The paper presents the lattice of a new booster synchrotron and its main parameters.


1998 ◽  
Vol 20 (4) ◽  
pp. 375-395 ◽  
Author(s):  
G. L. Carr ◽  
P. Dumas ◽  
C. J. Hirschmug ◽  
G. P. Williams

2018 ◽  
Vol 24 (S2) ◽  
pp. 392-393
Author(s):  
Gang Liu ◽  
Liang Chen ◽  
Yong Guan

AbstractThe soft X-ray Microscopy beamline BL07W at National Synchrotron Radiation Laboratory is devoted to cryo nano-tomography for biological applications in the water window (284 - 530 eV) and for imaging of nanomaterials from 200 to 2500 eV. An ellipsoidal capillary used as condense to focus monochromatic light onto the sample. Two Ni zone plate (ZP) lenses made by Zeiss with 40 nm and 25 nm outer most zone widths, respectively, are available, giving spatial resolution in 2D of down to 40 nm and 30 nm, respectively. Hydrated biological specimens had been imaged in the water window photon energy range without chemical fixation, dehydration, chemical staining and physical sectioning. In addition, other applications such as nanomaterials imaging had been demonstrated.


2001 ◽  
Vol 8 (2) ◽  
pp. 348-350 ◽  
Author(s):  
Faqiang Xu ◽  
Wenhan Liu ◽  
Shiqiang Wei ◽  
Chaoyin Xu ◽  
Guoqiang Pan ◽  
...  

2011 ◽  
Vol 1 (MEDSI-6) ◽  
Author(s):  
L. Doom ◽  
M. Anerella ◽  
T. Dilgen ◽  
R. Edwards ◽  
R. Faussete ◽  
...  

National Synchrotron Light Source II (NSLS-II) will be a 3-GeV 792 m circumference third generation synchrotron radiation facility with ultra low emittance and extremely high brightness. There will be a total of 90 multipole storage ring girders supporting the vacuum chambers, multipole magnets and various pieces of ancillary equipment. A major effort is being made to meet the stringent assembly and alignment requirements for the girder assemblies using relatively few and removable positioning fixtures. Girder assembly and alignment will be accomplished in four phases. Each of these phases will be described along with the fixtures required.


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