Scanning probe position encoder (SPPE): a new approach for high-precision and high-speed position measurement system

2001 ◽  
Author(s):  
Tetsuo Ohara
Keyword(s):  
High Precision ◽  
Measurement System ◽  
High Speed ◽  
Scanning Probe ◽  
Probe Position ◽  
Position Measurement ◽  
New Approach

Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

1999 ◽  
Vol 123 (1) ◽  
pp. 35-43 ◽  
Author(s):  
D. Croft ◽  
G. Shed ◽  
S. Devasia
Keyword(s):  
High Precision ◽  
Scanning Probe Microscopy ◽  
High Speed ◽  
Scanning Probe ◽  
Optical Systems ◽  
Positioning Precision ◽  
Force Microscopy ◽  
Atomic Force ◽  
Vibration Compensation ◽  
Adverse Affects

This article studies ultra-high-precision positioning with piezoactuators and illustrates the results with an example Scanning Probe Microscopy (SPM) application. Loss of positioning precision in piezoactuators occurs (1) due to hysteresis during long range applications, (2) due to creep effects when positioning is needed over extended periods of time, and (3) due to induced vibrations during high-speed positioning. This loss in precision restricts the use of piezoactuators in high-speed positioning applications like SPM-based nanofabrication, and ultra-high-precision optical systems. An integrated inversion-based approach is presented in this article to compensate for all three adverse affects—creep, hysteresis, and vibrations. The method is applied to an Atomic Force Microscope (AFM) and experimental results are presented that demonstrate substantial improvements in positioning precision and operating speed.

A Precise Position Measurement System of Roll-to-Roll Printing Using Burst Alignment Patterns

2018 ◽  
Author(s):  
Taehyeong Kim ◽  
Dongho Oh ◽  
Youngjin Kim ◽  
Jihyeon Kim ◽  
Byeongcheol Lee
Keyword(s):  
Measurement System ◽  
High Speed ◽  
Printed Electronics ◽  
High Volume ◽  
Measurement Range ◽  
Generation Process ◽  
Position Measurement ◽  
Process Technology ◽  
Precise Position ◽  
Roll To Roll

Printed electronics is a next-generation process technology that is suitable for high speed and high volume production and can make electronic devices and circuits on flexible materials. To commercialize printed electronics, it is necessary to improve the alignment precision of printing. In order to improve the alignment precision of the roll-to-roll process, accurate measurement of the web position is required. Therefore, in the previous research of this paper, we proposed a measurement system of the moving direction and the lateral movement using an encoder. However, in the previous study, the direction of error control had to be set according to the measurement position of the encoder, and the measurement range was so narrow. In this paper, we propose a measurement system that can detect the direction of error and increase the effective measurement range using the burst alignment pattern that generates the burst signal. Applying it to roll-to-roll printing position measurement systems, measurements can be performed with greatly improved efficiency and measurement range.

A Dynamic Position Measurement Method for Destructive Process of Structures Using Image Processing

2004 ◽  
Author(s):  
Hiroshi Nishizawa ◽  
Satoshi Fujita ◽  
Osamu Furuya
Keyword(s):  
Image Processing ◽  
High Precision ◽  
High Speed ◽  
Spherical Surface ◽  
Three Dimensional ◽  
Measuring System ◽  
Position Measurement ◽  
Surface Emission ◽  
Optical Motion ◽  
Optical Motion Capture

In order to clarify the destruction mechanism of large structures in large seismic movements, a non-contacting displacement measurement system with a three-dimensional dynamic position with high precision is required. We have developed a three-dimensional measuring system with image processing using optical motion capture technology. This system consists of light emitting markers installed on the object structure and plural high speed cameras which obtain images of markers’ movement simultaneously, to measure the dynamic position of the three dimensional spatial coordinates of the markers. In order to measure the dynamic position with high precision, we have ever developed sub-pixel processing method which is able to measure very small displacements of the markers by analyzing the luminance distribution. Moreover, we have developed a new marker of spherical surface emission type which formed the luminance profile to improve furthermore the accuracy in rotational movement. Shaking tests were carried out with this measuring system and the results indicated that this system using new markers had sufficient accuracy within errors of a few millimeters in the structure of a 4 meter cube. Consequently, we have acquired the potential to apply to the measurement to the 3-D Full Scale Earthquake Testing Facility (E-Defense).

High speed and high precision time-interval measurement system in pulsed laser ranging

2015 ◽  
Vol 30 (1) ◽  
pp. 83-88 ◽  
Author(s):  
岱钦 DAI Qin ◽  
毛有明 MAO You-ming ◽  
吴凯旋 WU Kai-xuan ◽  
吴杰 WU Jie ◽  
李业秋 LI Ye-qiu
Keyword(s):  
High Precision ◽  
Measurement System ◽  
High Speed ◽  
Pulsed Laser ◽  
Laser Ranging ◽  
Time Interval ◽  
Interval Measurement ◽  
Precision Time ◽  
Time Interval Measurement

Stitching of 3-D Image Position Measurement System with 1-D Direction-sensitive Devices

2001 ◽  
Vol 13 (6) ◽  
pp. 651-658
Author(s):  
Saied Mohamed ◽  
◽  
Toyomi Fujita ◽  
Masanori Idesawa
Keyword(s):  
High Precision ◽  
Measurement System ◽  
Bright Spot ◽  
Position Measurement ◽  
Position Sensing ◽  
Sensing System ◽  
Mathematical Techniques ◽  
Image Position

We previously proposed practical calibration of 3-D bright spot position measurement system using 3 1-D direction-sensitive devices. The proposed calibration enables easy setup of 1-D direction-sensitive devices to construct 3-D position sensing system; then the applicable fields and circumstances are extended extremely. The method is based on mathematical techniques which the situation of each 1-D mark direction sensitive device is determined automatically by referencing coordinates with 7 referential points. Here, we are proposing the stitching of measurement space of high-precision 3-D position sensing with 1-D mark direction-sensitive devices to expand measured space further. Our proposed method is essentially iterative application of calibration: reference coordinates are translated and rotated to include both adjacent measurement spaces step by step, calibration is executed, and the position and situation of each 1-D direction-sensitive device are found systematically.

Sign in / Sign up

Export Citation Format

Share Document