High precision real-time beam position measurement system

2003 ◽  
Author(s):  
K.J. Kleman
Keyword(s):  
Real Time ◽  
High Precision ◽  
Measurement System ◽  
Position Measurement ◽  
Beam Position

Stitching of 3-D Image Position Measurement System with 1-D Direction-sensitive Devices

2001 ◽  
Vol 13 (6) ◽  
pp. 651-658
Author(s):  
Saied Mohamed ◽  
◽  
Toyomi Fujita ◽  
Masanori Idesawa
Keyword(s):  
High Precision ◽  
Measurement System ◽  
Bright Spot ◽  
Position Measurement ◽  
Position Sensing ◽  
Sensing System ◽  
Mathematical Techniques ◽  
Image Position

We previously proposed practical calibration of 3-D bright spot position measurement system using 3 1-D direction-sensitive devices. The proposed calibration enables easy setup of 1-D direction-sensitive devices to construct 3-D position sensing system; then the applicable fields and circumstances are extended extremely. The method is based on mathematical techniques which the situation of each 1-D mark direction sensitive device is determined automatically by referencing coordinates with 7 referential points. Here, we are proposing the stitching of measurement space of high-precision 3-D position sensing with 1-D mark direction-sensitive devices to expand measured space further. Our proposed method is essentially iterative application of calibration: reference coordinates are translated and rotated to include both adjacent measurement spaces step by step, calibration is executed, and the position and situation of each 1-D direction-sensitive device are found systematically.

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