Electromagnetic scatterometry applied to in-situ metrology

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Keyword(s):  
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scholarly journals Advanced in situ metrology for x-ray beam shaping with super precision

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In Situ Metrology

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Gabriel Hosch
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In-situ metrology and testing of nanotwinned copper pillars for potential air gap applications

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Vol 87 (11) ◽  
pp. 2046-2049 ◽  
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Jenn-Ming Yang ◽  
Jia Ye ◽  
Andrew M. Minor
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In situ metrology of 85Kr plumes released by the COGEMA La Hague nuclear reprocessing plant

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Vol 72 (1-2) ◽  
pp. 137-144 ◽  
Author(s):  
R Gurriaran ◽  
D Maro ◽  
P Bouisset ◽  
D Hebert ◽  
G Leclerc ◽  
...  
Keyword(s):  
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