ABSTRACTThe conventional method for fabricating silicon IMPATT diode structures
involves the epitaxial growth of successive n- and p-type layers onto a
n+ substrate followed by a boron diffusion to form the final
p+ layer. The high temperature time cycles experienced by the
structure during these processes cause junction interfaces to become
degraded through dopant diffusion. In this paper we examine the application
of laser processing techniques to the epitaxial regrowth of low temperature
deposited layers and report on the nature of the recrystallised
material.
In this work, the benefits of the low-temperature halo-carbon epitaxial growth at 1300oC to form anodes of 4H-SiC PiN diodes were investigated. Regular-temperature epitaxial growth was used to form an 8.6 μm-thick n-type drift region with net donor concentration of 6.45x1015 cm-3. Trimethylaluminum doping, in situ during blanket low-temperature halo-carbon epitaxial growth, was used to form heavily doped p-type layers. Forward I-V characteristics measured from diodes having different anode areas indicated that the new epitaxial growth technique provides anodes with low values of the series resistance, even without contact annealing. At room temperature, a 100 μm-diameter diode had a forward voltage of 3.75 V at 1000A/cm² before annealing and 3.23 V after annealing for 2 min at 750°C. The reverse breakdown voltage was more than 680 V (on average) in the devices without edge termination or surface passivation.
The paper presents the results of the study on the effect of low-temperature heat treatment on color characteristics and protein oxidation products depending on the method, temperature and duration of heat treatment of culinary products from turkey meat. At present, the use of low-temperature processing in the production technology for meat products with improved organoleptic indices is a topical direction.
The history of calorimetry is described, starting with the small scintillating crystals that were used as nuclear gamma ray detectors, to the multi-ton instruments that form the heart of modern experiments at colliding-beam accelerators. The different experimental techniques that are used for generating signals are reviewed.
Low-Temperature Processing of Dense HydroxyapatiteZirconia Composites