Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO 2

2000 ◽  
Author(s):  
JingMin Leng ◽  
Shifang Li ◽  
Jon L. Opsal ◽  
David E. Aspnes ◽  
Byoung H. Lee ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Dielectric Film ◽  
High K ◽  
High K Dielectric

Effect of CF4 Plasma Pretreatment on TiO2 High-k Dielectric Film

2002 ◽  
Author(s):  
Tzu Yun Chang ◽  
Hsiao Wei Chen ◽  
Tan Fu Lei ◽  
Tien Sheng Chao ◽  
Chen Jung Wu
Keyword(s):  
Dielectric Film ◽  
High K ◽  
Plasma Pretreatment ◽  
High K Dielectric

Atomic layer-by-layer MOCVD of high-k dielectric thin films with in-situ monitoring by spectroscopic ellipsometry

2002 ◽  
Author(s):  
Yoshishige Tsuchiya ◽  
Masato Endoh ◽  
Masatoshi Kurosawa ◽  
Raymond T. Tung ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Dielectric Thin Films ◽  
High K ◽  
High K Dielectric

A Radar for Ultra-thin High-k Dielectric Film: Zero-Bias Thermally Stimulated Current Spectroscopy

2019 ◽  
Vol 1 (5) ◽  
pp. 577-589 ◽  
Author(s):  
Wai Shing Lau ◽  
Taejoon Han ◽  
G. L. Zhang ◽  
P. W. Qian ◽  
L. L. Leong ◽  
...  
Keyword(s):  
Dielectric Film ◽  
Thermally Stimulated Current ◽  
Zero Bias ◽  
High K ◽  
Thermally Stimulated Current Spectroscopy ◽  
High K Dielectric
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