Optical emission diagnostics of glow discharge plasma for the carbon nitride growth process

Mapping Intimacies ◽

10.1117/12.402652 ◽

2000 ◽

Cited By ~ 1

Author(s):

Wei Yu ◽

Shu-Fang Wang ◽

Xiao-Wei Li ◽

Lianshui Zhang ◽

Guangsheng Fu

Keyword(s):

Glow Discharge ◽

Growth Process ◽

Carbon Nitride ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Characterization of carbon nitride deposition from CH4∕N2 glow discharge plasma beams using optical emission spectroscopy

Physics of Plasmas ◽

10.1063/1.2953521 ◽

2008 ◽

Vol 15 (7) ◽

pp. 073502 ◽

Cited By ~ 7

Author(s):

Wei Hu ◽

Jun-Yi Tang ◽

Jia-da Wu ◽

Jian Sun ◽

Yi-qun Shen ◽

...

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Carbon Nitride ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Near cathode optical emission spectroscopy in N2–H2 glow discharge plasma

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.05.063 ◽

2007 ◽

Vol 202 (2) ◽

pp. 301-309 ◽

Cited By ~ 25

Author(s):

K.S. Suraj ◽

P. Bharathi ◽

V. Prahlad ◽

S. Mukherjee

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Optical Emission Spectroscopy of Combined Laser Ablation-Hollow Cathode Glow Discharge Plasma Source

NATO Science for Peace and Security Series B: Physics and Biophysics - Nano-Optics: Principles Enabling Basic Research and Applications ◽

10.1007/978-94-024-0850-8_57 ◽

2017 ◽

pp. 519-520

Author(s):

Stefan Karatodorov ◽

Valentin Mihailov ◽

Margarita Grozeva

Keyword(s):

Laser Ablation ◽

Glow Discharge ◽

Hollow Cathode ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Plasma Source ◽

Glow Discharge Plasma

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Application of optical emission spectroscopy for the determination of optimal CVD diamond growth parameters in abnormal glow discharge plasma

Vacuum ◽

10.1016/j.vacuum.2013.12.001 ◽

2014 ◽

Vol 103 ◽

pp. 28-32 ◽

Cited By ~ 18

Author(s):

S.A. Linnik ◽

A.V. Gaydaychuk

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Growth Parameters ◽

Optical Emission ◽

Cvd Diamond ◽

Glow Discharge Plasma ◽

Diamond Growth

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Comparative Investigation on The Characteristics of Glow Discharge Plasma using Glow Discharge Mass Spectrometry and Glow Discharge Optical Emission Spectrometry

DENKI-SEIKO ◽

10.4262/denkiseiko.75.173 ◽

2004 ◽

Vol 75 (3) ◽

pp. 173-179

Author(s):

Kazuaki Wagatsuma ◽

Takashi Saka ◽

Mika Yamaguchi ◽

Kiyotaka Ito

Keyword(s):

Mass Spectrometry ◽

Glow Discharge ◽

Discharge Plasma ◽

Optical Emission ◽

Comparative Investigation ◽

Optical Emission Spectrometry ◽

Glow Discharge Mass Spectrometry ◽

Glow Discharge Plasma ◽

Emission Spectrometry

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Optical emission spectroscopy of glow discharge plasma from SiH4−CH4 system

Electronics and Communications in Japan (Part II Electronics) ◽

10.1002/ecjb.20285 ◽

2007 ◽

Vol 90 (2) ◽

pp. 9-16 ◽

Cited By ~ 2

Author(s):

Mitsuya Motohashi ◽

Kenta Ashibu ◽

Yasutaka Hiruta ◽

Kazuaki Homma

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Discharge Plasma ◽

Optical Emission ◽

Glow Discharge Plasma

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Comparative investigation on the characteristics of glow discharge plasma using glow discharge mass spectrometry and glow discharge optical emission spectrometry

Journal of Analytical Atomic Spectrometry ◽

10.1039/b204747k ◽

2002 ◽

Vol 17 (10) ◽

pp. 1359-1362 ◽

Cited By ~ 8

Author(s):

Kazuaki Wagatsuma ◽

Takashi Saka ◽

Mika Yamaguchi ◽

Kiyotaka Ito

Keyword(s):

Mass Spectrometry ◽

Glow Discharge ◽

Discharge Plasma ◽

Optical Emission ◽

Comparative Investigation ◽

Optical Emission Spectrometry ◽

Glow Discharge Mass Spectrometry ◽

Glow Discharge Plasma ◽

Emission Spectrometry

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Application of Pulsed Voltage to d.c. Glow Discharge Plasma for Controlling the Sputtering Rate in Glow Discharge Optical Emission Spectrometry

ISIJ International ◽

10.2355/isijinternational.44.108 ◽

2004 ◽

Vol 44 (1) ◽

pp. 108-114 ◽

Cited By ~ 10

Author(s):

Kazuaki Wagatsuma

Keyword(s):

Glow Discharge ◽

Discharge Plasma ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Glow Discharge Plasma ◽

Emission Spectrometry ◽

Pulsed Voltage

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Recent understanding of the growth process of amorphous silicon from a silane glow-discharge plasma

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/39/5a/040 ◽

1997 ◽

Vol 39 (5A) ◽

pp. A431-A436 ◽

Cited By ~ 25

Author(s):

Akihisa Matsuda

Keyword(s):

Glow Discharge ◽

Amorphous Silicon ◽

Growth Process ◽

Discharge Plasma ◽

Glow Discharge Plasma

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Determination of Minor Alloyed Elements in Steel Samples in Radio-frequency Glow Discharge Plasma Optical Emission Spectrometry Associated with Pulsed Bias-Current Modulation Technique

ISIJ International ◽

10.2355/isijinternational.52.1616 ◽

2012 ◽

Vol 52 (9) ◽

pp. 1616-1621

Author(s):

Satomi Urushibata ◽

Kazuaki Wagatsuma

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Discharge Plasma ◽

Optical Emission ◽

Bias Current ◽

Glow Discharge Plasma ◽

Emission Spectrometry ◽

Radio Frequency Glow Discharge ◽

Plasma Optical Emission Spectrometry

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