Comparative investigation on the characteristics of glow discharge plasma using glow discharge mass spectrometry and glow discharge optical emission spectrometry

2002 ◽  
Vol 17 (10) ◽  
pp. 1359-1362 ◽  
Author(s):  
Kazuaki Wagatsuma ◽  
Takashi Saka ◽  
Mika Yamaguchi ◽  
Kiyotaka Ito
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