Diffraction analysis and evaluation of a focus-error detection scheme for an optical profilometer
Keyword(s):
1983 ◽
Vol 55
(1)
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pp. 141-158
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Keyword(s):
1971 ◽
Vol C-20
(1)
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pp. 44-48
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2007 ◽
Vol 42
(1)
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pp. 193-200
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