Absolute index of refraction and its temperature dependence of calcium fluoride, barium fluoride, and strontium fluoride near 157 nm

Author(s):  
John H. Burnett ◽  
Rajeev Gupta ◽  
Ulf Griesmann
1999 ◽  
Author(s):  
John H. Burnett ◽  
Rajeev Gupta ◽  
Ulf Griesmann ◽  
Ted E. Jou

Author(s):  
Mark Kimball

Abstract Silicon’s index of refraction has a strong temperature coefficient. This temperature dependence can be used to aid sample thinning procedures used for backside analysis, by providing a noncontact method of measuring absolute sample thickness. It also can remove slope ambiguity while counting interference fringes (used to determine the direction and magnitude of thickness variations across a sample).


1981 ◽  
Vol 5 ◽  
pp. 625-628 ◽  
Author(s):  
T.S. Aurora ◽  
S.M. Day ◽  
T.E. Duerr ◽  
D.O. Pederson

2015 ◽  
Vol 10 (1) ◽  
Author(s):  
Nandini Kumam ◽  
Ningthoujam Premananda Singh ◽  
Laishram Priyobarta Singh ◽  
Sri Krishna Srivastava

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