Barium fluoride and strontium fluoride negative electron beam resists

Author(s):  
A. Scherer
2019 ◽  
Vol 45 (13) ◽  
pp. 16591-16599 ◽  
Author(s):  
S. Yu Sokovnin ◽  
V.G. Il'ves ◽  
S.V. Zayats ◽  
M.G. Zuev

2003 ◽  
Vol 68 (8) ◽  
Author(s):  
Jan Kmetko ◽  
Chungjong Yu ◽  
Guennadi Evmenenko ◽  
Sumit Kewalramani ◽  
Pulak Dutta

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