Novel wafer track-based resolution enhancement technology for 248-nm DUV lithography

Mapping Intimacies ◽

10.1117/12.388366 ◽

2000 ◽

Author(s):

Tom X. Zhong ◽

Emir Gurer ◽

John W. Lewellen ◽

Ed C. Lee

Keyword(s):

Resolution Enhancement ◽

Enhancement Technology

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Image Resolution Enhancement Technology Based on Deep Neural Network

Advances in Intelligent Systems and Computing - Cyber Security Intelligence and Analytics ◽

10.1007/978-3-030-43306-2_97 ◽

2020 ◽

pp. 687-693

Author(s):

Ping Yu

Keyword(s):

Neural Network ◽

Deep Neural Network ◽

Resolution Enhancement ◽

Image Resolution ◽

Enhancement Technology

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Fabrication of isolated gates by negative-tone process and resolution enhancement technology

10.1117/12.388948 ◽

2000 ◽

Author(s):

Ryoko Morikawa ◽

Noboru Uchida ◽

Minoru Watanabe ◽

Sachiko Yabe ◽

Satoshi Machida ◽

...

Keyword(s):

Resolution Enhancement ◽

Enhancement Technology ◽

Negative Tone

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The application of optical resolution enhancement technology and e-beam direct writing technology in microfabrication

10.1117/12.576170 ◽

2005 ◽

Author(s):

Yulin Qiu ◽

Baoqin Chen ◽

Ming Liu ◽

Qiuxia Xu ◽

Lijun Xue ◽

...

Keyword(s):

Resolution Enhancement ◽

Optical Resolution ◽

Direct Writing ◽

Enhancement Technology ◽

Writing Technology

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Optimization of resolution-enhancement technology and dual-layer bottom-antireflective coatings in hypernumerical aperture lithography

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2870220 ◽

2008 ◽

Vol 26 (2) ◽

pp. 534

Author(s):

Yanqiu Li ◽

Yuan Zhou

Keyword(s):

Resolution Enhancement ◽

Antireflective Coatings ◽

Enhancement Technology

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Option of resolution enhancement technology in advanced lithography

10.1117/12.782511 ◽

2007 ◽

Author(s):

Yanqui Li ◽

Yuan Zhou

Keyword(s):

Resolution Enhancement ◽

Enhancement Technology

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Resolution enhancement technology in Hewlett-Packard LaserJet printers

10.1117/12.146282 ◽

1993 ◽

Cited By ~ 3

Author(s):

Charles C. Tung

Keyword(s):

Resolution Enhancement ◽

Hewlett Packard ◽

Enhancement Technology

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From optical proximity correction to lithography-driven physical design (1996-2006): 10 years of resolution enhancement technology and the roadmap enablers for the next decade

10.1117/12.663289 ◽

2006 ◽

Cited By ~ 16

Author(s):

Luigi Capodieci

Keyword(s):

Resolution Enhancement ◽

Physical Design ◽

Optical Proximity Correction ◽

Enhancement Technology

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E-beam GIDC resolution enhancement technology in practical applications

10.1117/12.2030822 ◽

2013 ◽

Author(s):

S. Martens ◽

J. Butschke ◽

R. Galler ◽

M. Krüger ◽

H. Sailer ◽

...

Keyword(s):

Resolution Enhancement ◽

Practical Applications ◽

Enhancement Technology

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Resolution enhancement technology: the past, the present, and extensions for the future

10.1117/12.548923 ◽

2004 ◽

Cited By ~ 53

Author(s):

Franklin M. Schellenberg

Keyword(s):

Resolution Enhancement ◽

The Past ◽

Enhancement Technology ◽

The Future

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Resolution enhancement technology requirements for 65-nm node

10.1117/12.485486 ◽

2003 ◽

Cited By ~ 2

Author(s):

Armen Kroyan ◽

Hua-Yu Liu

Keyword(s):

Resolution Enhancement ◽

Enhancement Technology

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