Optimization of resolution-enhancement technology and dual-layer bottom-antireflective coatings in hypernumerical aperture lithography

2008 ◽  
Vol 26 (2) ◽  
pp. 534
Author(s):  
Yanqiu Li ◽  
Yuan Zhou
Keyword(s):  
Resolution Enhancement ◽  
Antireflective Coatings ◽  
Enhancement Technology

Fabrication of isolated gates by negative-tone process and resolution enhancement technology

2000 ◽  
Author(s):  
Ryoko Morikawa ◽  
Noboru Uchida ◽  
Minoru Watanabe ◽  
Sachiko Yabe ◽  
Satoshi Machida ◽  
...  
Keyword(s):  
Resolution Enhancement ◽  
Enhancement Technology ◽  
Negative Tone

Novel wafer track-based resolution enhancement technology for 248-nm DUV lithography

2000 ◽  
Author(s):  
Tom X. Zhong ◽  
Emir Gurer ◽  
John W. Lewellen ◽  
Ed C. Lee
Keyword(s):  
Resolution Enhancement ◽  
Enhancement Technology

E-beam GIDC resolution enhancement technology in practical applications

2013 ◽  
Author(s):  
S. Martens ◽  
J. Butschke ◽  
R. Galler ◽  
M. Krüger ◽  
H. Sailer ◽  
...  
Keyword(s):  
Resolution Enhancement ◽  
Practical Applications ◽  
Enhancement Technology
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