Lithography and line-edge roughness of high-activation-energy resists
Keyword(s):
2015 ◽
Vol 4
(3)
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pp. 153-176
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2012 ◽
Vol 370
(1960)
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pp. 567-596
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2007 ◽
Vol 27
(11)
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pp. 3295-3299
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1991 ◽
Vol 66-69
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pp. 1421-1424
1980 ◽
Vol 21
(5-6)
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pp. 191-197
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Keyword(s):
Keyword(s):
1995 ◽
Vol 6
(4)
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pp. 287-306
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