Global space charge effects in high-throughput electron-beam lithography

Mapping Intimacies ◽

10.1117/12.370130 ◽

1999 ◽

Cited By ~ 1

Author(s):

Liqun Han ◽

W. D. Meisburger ◽

Roger Fabian W. Pease ◽

Gil I. Winograd

Keyword(s):

Electron Beam ◽

Space Charge ◽

High Throughput ◽

Electron Beam Lithography ◽

Space Charge Effects ◽

Charge Effects ◽

Global Space

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Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1359174 ◽

2001 ◽

Vol 19 (2) ◽

pp. 476 ◽

Cited By ~ 10

Author(s):

J. A. Liddle ◽

M. I. Blakey ◽

K. Bolan ◽

R. C. Farrow ◽

G. M. Gallatin ◽

...

Keyword(s):

Electron Beam ◽

Space Charge ◽

Electron Beam Lithography ◽

Space Charge Effects ◽

Charge Effects ◽

Lithography System

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Global space charge effects in ion-beam lithography

10.1117/12.221618 ◽

1995 ◽

Author(s):

John J. Petillo ◽

Alfred A. Mondelli

Keyword(s):

Space Charge ◽

Ion Beam ◽

Space Charge Effects ◽

Charge Effects ◽

Ion Beam Lithography ◽

Global Space

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Crossed Electron Beam Technique for Measuring Space‐Charge Effects in Beams

Journal of Applied Physics ◽

10.1063/1.1721715 ◽

1954 ◽

Vol 25 (5) ◽

pp. 679-680

Author(s):

Paul D. Coleman ◽

Murray D. Sirkis ◽

Irving Kaufman

Keyword(s):

Electron Beam ◽

Space Charge ◽

Space Charge Effects ◽

Charge Effects ◽

Beam Technique ◽

Measuring Space

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Space charge effects on electron trajectories and electron kinetic energy in a low-energy electron beam ion trap

Physica Scripta ◽

10.1088/0031-8949/2011/t144/014058 ◽

2011 ◽

Vol T144 ◽

pp. 014058 ◽

Cited By ~ 1

Author(s):

X Jin ◽

J Xiao ◽

R Hutton ◽

Y Zou

Keyword(s):

Electron Beam ◽

Kinetic Energy ◽

Space Charge ◽

Ion Trap ◽

Low Energy ◽

Space Charge Effects ◽

Charge Effects ◽

Electron Trajectories ◽

Electron Beam Ion Trap ◽

Low Energy Electron

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Space Charge Effects in a Gyrotron Employing a Solid Electron Beam

1981 International Conference on Submillimeter Waves and Their Applications ◽

10.1109/icswa.1981.9335180 ◽

1981 ◽

Author(s):

H. Keren ◽

J. L. Hirshfield

Keyword(s):

Electron Beam ◽

Space Charge ◽

Space Charge Effects ◽

Charge Effects

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Three-dimensional codes for simulating electron beam transport and free-electron laser operation including space-charge effects

International Journal of Electronics ◽

10.1080/00207219508926191 ◽

1995 ◽

Vol 78 (3) ◽

pp. 581-590 ◽

Cited By ~ 17

Author(s):

Y. PINHASI ◽

M. COHEN ◽

A. GOVERT

Keyword(s):

Electron Beam ◽

Space Charge ◽

Free Electron ◽

Free Electron Laser ◽

Three Dimensional ◽

Laser Operation ◽

Beam Transport ◽

Space Charge Effects ◽

Charge Effects ◽

Electron Beam Transport

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Studies of space charge effects on operating electron beam ion trap at low electron beam energy

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/j.nima.2012.12.025 ◽

2013 ◽

Vol 720 ◽

pp. 100-104

Author(s):

Xuelong Jin ◽

Zejie Fei ◽

Jun Xiao ◽

Di Lu ◽

Roger Hutton ◽

...

Keyword(s):

Electron Beam ◽

Space Charge ◽

Beam Energy ◽

Ion Trap ◽

Electron Beam Energy ◽

Space Charge Effects ◽

Charge Effects ◽

Electron Beam Ion Trap

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Space-charge effects in high brightness electron beam emittance measurements

Physical Review Special Topics - Accelerators and Beams ◽

10.1103/physrevstab.5.014201 ◽

2002 ◽

Vol 5 (1) ◽

Cited By ~ 58

Author(s):

S. G. Anderson ◽

J. B. Rosenzweig ◽

G. P. LeSage ◽

J. K. Crane

Keyword(s):

Electron Beam ◽

Space Charge ◽

Space Charge Effects ◽

Beam Emittance ◽

Charge Effects ◽

High Brightness

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Nullification of Space-Charge Effects in a Converging Electron Beam by a Magnetic Field

Proceedings of the IRE ◽

10.1109/jrproc.1952.273933 ◽

1952 ◽

Vol 40 (1) ◽

pp. 61-64 ◽

Cited By ~ 6

Author(s):

M. Hines

Keyword(s):

Magnetic Field ◽

Electron Beam ◽

Space Charge ◽

Space Charge Effects ◽

Charge Effects

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Space charge effects in a gyrotron employing a solid electron beam

International Journal of Infrared and Millimeter Waves ◽

10.1007/bf01007076 ◽

1981 ◽

Vol 2 (6) ◽

pp. 1097-1112

Author(s):

H. Keren ◽

J. L. Hirshfield

Keyword(s):

Electron Beam ◽

Space Charge ◽

Space Charge Effects ◽

Charge Effects

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