Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system

2001 ◽  
Vol 19 (2) ◽  
pp. 476 ◽  
Author(s):  
J. A. Liddle ◽  
M. I. Blakey ◽  
K. Bolan ◽  
R. C. Farrow ◽  
G. M. Gallatin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
Electron Beam Lithography ◽  
Space Charge Effects ◽  
Charge Effects ◽  
Lithography System

Global space charge effects in high-throughput electron-beam lithography

1999 ◽  
Author(s):  
Liqun Han ◽  
W. D. Meisburger ◽  
Roger Fabian W. Pease ◽  
Gil I. Winograd
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
High Throughput ◽  
Electron Beam Lithography ◽  
Space Charge Effects ◽  
Charge Effects ◽  
Global Space

Crossed Electron Beam Technique for Measuring Space‐Charge Effects in Beams

1954 ◽  
Vol 25 (5) ◽  
pp. 679-680
Author(s):  
Paul D. Coleman ◽  
Murray D. Sirkis ◽  
Irving Kaufman
Keyword(s):  
Electron Beam ◽  
Space Charge ◽  
Space Charge Effects ◽  
Charge Effects ◽  
Beam Technique ◽  
Measuring Space
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