Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering

1999 ◽  
Author(s):  
Stefan Gliech ◽  
Angela Duparre ◽  
Rolf-Juergen Recknagel ◽  
Gunther Notni
Keyword(s):  
Light Scattering ◽  
White Light ◽  
Surface Characterization ◽  
Scanning Force Microscopy ◽  
White Light Interferometry ◽  
Force Microscopy ◽  
Scanning Force ◽  
Wide Scale ◽  
Scale Surface

Nanometer-Scale Surface Modification Using Scanning Force Microscopy in Chemically Active Environments

2004 ◽  
Author(s):  
Lauralice Campos Franceschini Canale ◽  
Ov_´dio Richard Crnkovic ◽  
Paul Chu ◽  
Xiubo Tian ◽  
Jeff De Hosson ◽  
...  
Keyword(s):  
Surface Modification ◽  
Scanning Force Microscopy ◽  
Nanometer Scale ◽  
Force Microscopy ◽  
Scanning Force ◽  
Scale Surface

Scanning force microscopy application to polymer surfaces for novel nanoscale surface characterization

1996 ◽  
Vol 273 (1-2) ◽  
pp. 304-307 ◽  
Author(s):  
Makoto Motomatsu ◽  
Heng-Yong Nie ◽  
Wataru Mizutani ◽  
Hiroshi Tokumoto
Keyword(s):  
Surface Characterization ◽  
Scanning Force Microscopy ◽  
Polymer Surfaces ◽  
Force Microscopy ◽  
Scanning Force

scholarly journals Precrystallization structures in supersaturated lysozyme solutions studied by dynamic light scattering and scanning force microscopy

1997 ◽  
Vol 106 (20) ◽  
pp. 8587-8594 ◽  
Author(s):  
Achim Schaper ◽  
Yannis Georgalis ◽  
Patrick Umbach ◽  
Jannis Raptis ◽  
Wolfram Saenger
Keyword(s):  
Light Scattering ◽  
Dynamic Light Scattering ◽  
Scanning Force Microscopy ◽  
Force Microscopy ◽  
Scanning Force

Surface characterization of P3OT thin films by variable temperature scanning force microscopy

2011 ◽  
Vol 161 (15-16) ◽  
pp. 1651-1659 ◽  
Author(s):  
E. López-Elvira ◽  
B. García-Pérez ◽  
J. Colchero ◽  
E. Palacios-Lidón
Keyword(s):  
Thin Films ◽  
Surface Characterization ◽  
Variable Temperature ◽  
Scanning Force Microscopy ◽  
Force Microscopy ◽  
Scanning Force ◽  
Temperature Scanning

Scanned tip measurement of deep vertical facets on a flat surface: Measuring roughness on gaas laser waveguide mirrors

1993 ◽  
Vol 51 ◽  
pp. 532-533
Author(s):  
Chang Shen ◽  
Phil Fraundorf ◽  
Robert W. Harrick
Keyword(s):  
Integrated Circuits ◽  
Flat Surface ◽  
Scanning Force Microscopy ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Force Microscopy ◽  
Optoelectronic Integrated Circuits ◽  
Laser Waveguide ◽  
Scanning Force ◽  
Gaas Laser

Monolithic integration of optoelectronic integrated circuits (OEIC) requires high quantity etched laser facets which prevent the developing of more-highly-integrated OEIC's. The causes of facet roughness are not well understood, and improvement of facet quality is hampered by the difficulty in measuring the surface roughness. There are several approaches to examining facet roughness qualitatively, such as scanning force microscopy (SFM), scanning tunneling microscopy (STM) and scanning electron microscopy (SEM). The challenge here is to allow more straightforward monitoring of deep vertical etched facets, without the need to cleave out test samples. In this presentation, we show air based STM and SFM images of vertical dry-etched laser facets, and discuss the image acquisition and roughness measurement processes. Our technique does not require precision cleaving. We use a traditional tip instead of the T shape tip used elsewhere to preventing “shower curtain” profiling of the sidewall. We tilt the sample about 30 to 50 degrees to avoid the curtain effect.

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