Fabrication of surface gratings in GaAs and AlGaAs by electron beam lithography and chemically assisted ion beam etching

1999 ◽  
Author(s):  
Jens Dienelt ◽  
Karsten Otte ◽  
Klaus-Peter Zimmer ◽  
F. Pietag ◽  
Frieder Bigl
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Ion Beam ◽  
Ion Beam Etching

Laterally-Coupled Distributed Feedback laser fabricated with electron beam lithography and chemically assisted ion beam etching

1995 ◽  
Vol 27 (1-4) ◽  
pp. 67-70 ◽  
Author(s):  
R.C. Tiberio ◽  
P.F. Chapman ◽  
J.P. Drumheller ◽  
R.D. Martin ◽  
S. Forouhar ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Ion Beam ◽  
Distributed Feedback ◽  
Distributed Feedback Laser ◽  
Ion Beam Etching

C60Resist Mask of Electron Beam Lithography for Chlorine-Based Reactive Ion Beam Etching

1998 ◽  
Vol 37 (Part 1, No. 7A) ◽  
pp. 4211-4212 ◽  
Author(s):  
Akihiro Matsutani ◽  
Fumio Koyama ◽  
Kenichi Iga
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Reactive Ion Beam Etching
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