Analysis of tolerances in a grating interferometer for high-resolution displacement measurement
1967 ◽
Vol 28
(C2)
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pp. C2-156-C2-164
1969 ◽
Vol 1
(5)
◽
pp. 192-194
◽
Keyword(s):
2010 ◽
Vol 21
(11)
◽
pp. 115304
◽
Keyword(s):
1997 ◽
Vol 9
(5)
◽
pp. 651-653
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