Accurate determination of the hydrogen concentration of silicon nitride layers by Fourier transform spectroscopy
1997 ◽
Vol 38
(4)
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pp. 223-226
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1992 ◽
Vol 47
(6)
◽
pp. 761-764
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1978 ◽
Vol 31
(1)
◽
pp. 23-32
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1987 ◽
Vol 26
(Part 1, No. 9)
◽
pp. 1606-1607
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Keyword(s):
2013 ◽
Vol 61
(13)
◽
pp. 3235-3241
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