Pattern-specific emulation (PSE) for ion-beam projection lithography masks using finite element analysis

1998 ◽  
Author(s):  
Adam H. Fisher ◽  
Roxann L. Engelstad ◽  
Edward G. Lovell
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Ion Beam ◽  
Element Analysis ◽  
Projection Lithography ◽  
Beam Projection

Fracture Toughness Evaluation of a Cracked Au Thin Film by Applying a Finite Element Analysis and Bulge Test

2019 ◽  
Vol 827 ◽  
pp. 196-202
Author(s):  
Hector A. Tinoco ◽  
Pavel Hutař ◽  
Benoit Merle ◽  
Mathias Göken ◽  
Tomáš Kruml
Keyword(s):  
Thin Film ◽  
Fracture Toughness ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Experimental Tests ◽  
Bulge Test ◽  
Element Analysis ◽  
Plastic Properties

This paper presents a finite element analysis of a pre-cracked freestanding gold thin film subjected to bulge test. These tests were conducted in order to determine the elasto-plastic properties and fracture toughness of the gold films. For the experimental tests, a pre-crack was introduced in the center of the film by focused ion beam (FIB) milling with a length of 10 and a width of 100nm. For the numerical fracture analysis, the problem was divided into two stages; the first stage was the development of the numerical model on the whole film without pre-crack (elasto-plastic analysis) and the second one was performed on a film portion that included the pre-crack (sub-modeling stage). Three different notches (rounded, sharp and V-sharp) were applied to calculate the stress intensity factor around the crack tip using path independent J-integral. The obtained results show that the load-deflection curves for non-cracked and pre-cracked film reproduced the experiments using the calculated elasto-plastic properties. This indicates that the proposed models presented a good correlation and robustness. Additionally, fracture toughness values were calculated between 0.288 and 0.303with J-integral values 1.037 J/m2 (elastic) and 1.136 J/m2 (elasto-plastic) which correspond with other calculations available in the literature.

Finite element analysis on dental implant[ndash ]supported prostheses without passive fit

2002 ◽  
Vol 11 (1) ◽  
pp. 30-40 ◽  
Author(s):  
Chatchai Kunavisarut ◽  
Lisa A. Lang ◽  
Brian R. Stoner ◽  
David A. Felton
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Dental Implant ◽  
Element Analysis ◽  
Passive Fit

Performance enhancement of normal contact ratio gearing system through correction factor

2019 ◽  
Vol 13 (3) ◽  
pp. 5242-5258
Author(s):  
R. Ravivarman ◽  
K. Palaniradja ◽  
R. Prabhu Sekar
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Correction Factor ◽  
Bending Strength ◽  
Performance Enhancement ◽  
Transmission Ratio ◽  
Contact Ratio ◽  
Element Analysis ◽  
Normal Contact ◽  
Root Region

As lined, higher transmission ratio drives system will have uneven stresses in the root region of the pinion and wheel. To enrich this agility of uneven stresses in normal-contact ratio (NCR) gearing system, an enhanced system is desirable to be industrialized. To attain this objective, it is proposed to put on the idea of modifying the correction factor in such a manner that the bending strength of the gearing system is improved. In this work, the correction factor is modified in such a way that the stress in the root region is equalized between the pinion and wheel. This equalization of stresses is carried out by providing a correction factor in three circumstances: in pinion; wheel and both the pinion and the wheel. Henceforth performances of this S+, S0 and S- drives are evaluated in finite element analysis (FEA) and compared for balanced root stresses in parallel shaft spur gearing systems. It is seen that the outcomes gained from the modified drive have enhanced performance than the standard drive.

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