scholarly journals Laser cleaning of silicon surfaces

1998 ◽  
Author(s):  
Paul Leiderer ◽  
Johannes Boneberg ◽  
Mario Mosbacher ◽  
Andreas Schilling ◽  
Oguz Yavas
Keyword(s):  
Laser Cleaning ◽  
Silicon Surfaces

scholarly journals STEAM LASER CLEANING OF SILICON SURFACES: LASER-INDUCED GAS BUBBLE NUCLEATION AND EFFICIENCY MEASUREMENTS

2002 ◽  
pp. 255-310 ◽  
Author(s):  
P. Leiderer ◽  
M. Mosbacher ◽  
V. Dobler ◽  
A. Schilling ◽  
O. Yavas ◽  
...  
Keyword(s):  
Bubble Nucleation ◽  
Laser Cleaning ◽  
Silicon Surfaces ◽  
Gas Bubble

scholarly journals Acoustic laser cleaning of silicon surfaces

2007 ◽  
Vol 89 (1) ◽  
pp. 109-113 ◽  
Author(s):  
T. Geldhauser ◽  
F. Ziese ◽  
F. Merkt ◽  
A. Erbe ◽  
J. Boneberg ◽  
...  
Keyword(s):  
Laser Cleaning ◽  
Silicon Surfaces

Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

2003 ◽  
Vol 92 ◽  
pp. 133-134 ◽  
Author(s):  
P. Leiderer ◽  
M. Mosbacher ◽  
J. Boneberg ◽  
C. Bartels ◽  
F. Lang ◽  
...  
Keyword(s):  
Laser Cleaning ◽  
Silicon Surfaces ◽  
Particle Removal

Investigation of acoustic monitoring in the laser cleaning of copper

1997 ◽  
Author(s):  
J. M. Lee ◽  
K. G. Watkins ◽  
A. Kearns ◽  
W. M. Steen ◽  
J. D. Ryan ◽  
...  
Keyword(s):  
Acoustic Monitoring ◽  
Laser Cleaning

On Path Generation Method for Laser Cleaning Robot Based on Line Structured Light

2020 ◽  
Author(s):  
Qingzeng Ma ◽  
Dongbin Zhang ◽  
Shuo Jin ◽  
Yuan Ren ◽  
Wei Cheng ◽  
...  
Keyword(s):  
Structured Light ◽  
Laser Cleaning ◽  
Path Generation ◽  
Cleaning Robot ◽  
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