Modeling of laser cleaning of metallic particulate contaminants from silicon surfaces

2002 ◽  
Vol 92 (12) ◽  
pp. 6973-6982 ◽  
Author(s):  
M. Arronte ◽  
P. Neves ◽  
R. Vilar
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Laser Cleaning ◽  
Silicon Surfaces ◽  
Particulate Contaminants

scholarly journals STEAM LASER CLEANING OF SILICON SURFACES: LASER-INDUCED GAS BUBBLE NUCLEATION AND EFFICIENCY MEASUREMENTS

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Author(s):  
P. Leiderer ◽  
M. Mosbacher ◽  
V. Dobler ◽  
A. Schilling ◽  
O. Yavas ◽  
...  
Keyword(s):  
Bubble Nucleation ◽  
Laser Cleaning ◽  
Silicon Surfaces ◽  
Gas Bubble

Laser Cleaning Techniques for Removing Surface Particulate Contaminants on Sol-Gel SiO 2 Films

2011 ◽  
Vol 28 (7) ◽  
pp. 074205 ◽  
Author(s):  
Chun-Lai Zhang ◽  
Xi-Bin Li ◽  
Zhi-Guo Wang ◽  
Chun-Ming Liu ◽  
Xia Xiang ◽  
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Keyword(s):  
Sol Gel ◽  
Laser Cleaning ◽  
Particulate Contaminants

scholarly journals Acoustic laser cleaning of silicon surfaces

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pp. 109-113 ◽  
Author(s):  
T. Geldhauser ◽  
F. Ziese ◽  
F. Merkt ◽  
A. Erbe ◽  
J. Boneberg ◽  
...  
Keyword(s):  
Laser Cleaning ◽  
Silicon Surfaces

Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

2003 ◽  
Vol 92 ◽  
pp. 133-134 ◽  
Author(s):  
P. Leiderer ◽  
M. Mosbacher ◽  
J. Boneberg ◽  
C. Bartels ◽  
F. Lang ◽  
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Laser Cleaning ◽  
Silicon Surfaces ◽  
Particle Removal

KrF excimer laser dry and steam cleaning of silicon surfaces with metallic particulate contaminants

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Vol 74 (2) ◽  
pp. 191-199 ◽  
Author(s):  
P. Neves ◽  
M. Arronte ◽  
R. Vilar ◽  
A.M. Botelho do Rego
Keyword(s):  
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Silicon Surfaces ◽  
Krf Excimer Laser ◽  
Particulate Contaminants

scholarly journals Laser cleaning of silicon surfaces

1998 ◽  
Author(s):  
Paul Leiderer ◽  
Johannes Boneberg ◽  
Mario Mosbacher ◽  
Andreas Schilling ◽  
Oguz Yavas
Keyword(s):  
Laser Cleaning ◽  
Silicon Surfaces
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