Examination of several novel approaches for the measurement of two-dimensional roughness of sidewalls of high-aspect-ratio patterns using the atomic force microscope

1998 ◽  
Author(s):  
Jeffrey R. Kingsley ◽  
Robert J. Plano ◽  
Kuo-Jen Chao
Keyword(s):  
Aspect Ratio ◽  
Atomic Force Microscope ◽  
High Aspect Ratio ◽  
Two Dimensional ◽  
Atomic Force ◽  
Novel Approaches

Mechanical properties of high-aspect-ratio atomic-force microscope tips

2002 ◽  
Vol 80 (24) ◽  
pp. 4623-4625 ◽  
Author(s):  
G. Jänchen ◽  
P. Hoffmann ◽  
A. Kriele ◽  
H. Lorenz ◽  
A. J. Kulik ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Aspect Ratio ◽  
Atomic Force Microscope ◽  
High Aspect Ratio ◽  
Atomic Force

Ultrasharp and high aspect ratio carbon nanotube atomic force microscopy probes for enhanced surface potential imaging

2008 ◽  
Vol 19 (23) ◽  
pp. 235704 ◽  
Author(s):  
Minhua Zhao ◽  
Vaneet Sharma ◽  
Haoyan Wei ◽  
Robert R Birge ◽  
Jeffrey A Stuart ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Carbon Nanotube ◽  
Aspect Ratio ◽  
Surface Potential ◽  
High Aspect Ratio ◽  
Force Microscopy ◽  
Atomic Force ◽  
Enhanced Surface

A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning

2017 ◽  
Vol 5 (4) ◽  
Author(s):  
E. B. Brousseau ◽  
S. Thiery ◽  
B. Arnal ◽  
E. Nyiri ◽  
O. Gibaru ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Computer Aided Design ◽  
Two Dimensional ◽  
Atomic Force ◽  
Machining Errors ◽  
Computer Aided ◽  
Design And Manufacturing ◽  
Cad Cam ◽  
G Code ◽  
Aided Design

This paper reports a feasibility study that demonstrates the implementation of a computer-aided design and manufacturing (CAD/CAM) approach for producing two-dimensional (2D) patterns on the nanoscale using the atomic force microscope (AFM) tip-based nanomachining process. To achieve this, simple software tools and neutral file formats were used. A G-code postprocessor was also developed to ensure that the controller of the AFM equipment utilized could interpret the G-code representation of tip path trajectories generated using the computer-aided manufacturing (CAM) software. In addition, the error between a machined pattern and its theoretical geometry was also evaluated. The analyzed pattern covered an area of 20 μm × 20 μm. The average machined error in this case was estimated to be 66 nm. This value corresponds to 15% of the average width of machined grooves. Such machining errors are most likely due to the flexible nature of AFM probe cantilevers. Overall, it is anticipated that such a CAD/CAM approach could contribute to the development of a more flexible and portable solution for a range of tip-based nanofabrication tasks, which would not be restricted to particular customised software or AFM instruments. In the case of nanomachining operations, however, further work is required first to generate trajectories, which can compensate for the observed machining errors.

Theoretical Approach to Contrast Mechanism for U-AFM

2002 ◽  
Author(s):  
C. Miyasaka ◽  
B. R. Tittmann ◽  
T. Adachi ◽  
A. Yamaji
Keyword(s):  
Theoretical Analysis ◽  
Resonant Frequency ◽  
Atomic Force Microscope ◽  
Dynamic Theory ◽  
Beam Theory ◽  
Ultrasonic Waves ◽  
Two Dimensional ◽  
Atomic Force ◽  
Afm Imaging ◽  
Contrast Mechanism

When the Ultrasonic-Atomic Force Microscope (U-AFM) is used to form an image of a surface of a specimen having discontinuities, contrast of the specimen in the image is usually stronger than that of an image formed by a conventional Atomic Force Microscope (AFM). In this article, the mechanism of the contrast of the image obtained by the U-AFM was explained by theoretical analysis. A ceramic and metal jointed bar (Steel/Cu/Si3N4) was selected as a specimen for this study. The specimen was located on the surface of a disc transducer generating ultrasonic waves up to 500 KHz, and was vibrated, wherein its first resonant frequency was 133.43 kHz. Both stress and displacement of the specimen were analyzed by classical beam theory and the two-dimensional elasto-dynamic theory. Experimental U-AFM imaging analyses were also carried out to compare the results.

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