Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering

1998 ◽  
Author(s):  
Chunaeni Latief ◽  
M. Barmawi
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Ybco Thin Film ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering

2014 ◽  
Vol 555 ◽  
pp. 93-99 ◽  
Author(s):  
Minehide Kusayanagi ◽  
Azusa Uchida ◽  
Nobuto Oka ◽  
Junjun Jia ◽  
Shin-ichi Nakamura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Zno Films ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Doped Zno

Nanoimprinting of Ti–Cu-based thin-film metallic glasses deposited by unbalanced magnetron sputtering

2017 ◽  
Vol 707 ◽  
pp. 132-136 ◽  
Author(s):  
Junpei Kobata ◽  
Ken-ichi Miura ◽  
Kenji Amiya ◽  
Yasuyuki Fukuda ◽  
Yasunori Saotome
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Metallic Glasses ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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