Applications and use of in-situ chemical sensors in semiconductor manufacturing

1997 ◽  
Author(s):  
Donald L. Tolliver ◽  
George H. Atkinson
Keyword(s):  
Chemical Sensors ◽  
Semiconductor Manufacturing

In Situ Trace Analysis of Oil in Water with Mid-Infrared Fiberoptic Chemical Sensors

2012 ◽  
Vol 84 (3) ◽  
pp. 1274-1280 ◽  
Author(s):  
Yuliya Luzinova ◽  
Bogdan Zdyrko ◽  
Igor Luzinov ◽  
Boris Mizaikoff
Keyword(s):  
Chemical Sensors ◽  
Trace Analysis ◽  
Mid Infrared ◽  
Oil In Water

New chalcogenide glass chemical sensors for S2- and dissolved H2S monitoring

2003 ◽  
Vol 47 (2) ◽  
pp. 135-140 ◽  
Author(s):  
M. Miloshova ◽  
D. Baltes ◽  
E. Bychkov
Keyword(s):  
Process Control ◽  
Chalcogenide Glass ◽  
Chemical Sensors ◽  
Industrial Process ◽  
In Situ Monitoring ◽  
Potential Hazard ◽  
Reliable Monitoring ◽  
Industrial Process Control ◽  
Monitoring Devices

A non-optimised treatment of wastewaters containing organic and biological substances is very often accompanied by an accidental emanation of hydrogen sulphide H2S and therefore leads (i) to an undesirable odour in the vicinity of water treatment plants, and (ii) to a potential hazard for the neighbouring population. Fast, sensitive and reliable monitoring devices are hence of significant importance. Chalcogenide and chalcohalide glasses are new promising membrane materials for detection of heavy metal ions and toxic anions and particularly well adapted for continuous in situ monitoring and industrial process control. In the present paper, we will discuss analytical characteristics of new chalcogenide glass chemical sensors for detection of S2− and dissolved H2S, which allow reliable process control to be carried out at natural pH of wastewaters.

Fiber-optic-based chemical sensors for in-situ measurement of metals and aromatic organic compounds in seawater and soil systems

1990 ◽  
Author(s):  
Stephen H. Lieberman ◽  
Scott Inman ◽  
Gregory A. Theriault ◽  
Stafford S. Cooper ◽  
Philip G. Malone ◽  
...  
Keyword(s):  
Organic Compounds ◽  
Chemical Sensors ◽  
Fiber Optic ◽  
In Situ Measurement ◽  
Soil Systems

scholarly journals Chemical sensors for in situ data collection in the cryosphere

2016 ◽  
Vol 82 ◽  
pp. 348-357 ◽  
Author(s):  
Elizabeth A. Bagshaw ◽  
Alexander Beaton ◽  
Jemma L. Wadham ◽  
Matt Mowlem ◽  
Jon R. Hawkings ◽  
...  
Keyword(s):  
Data Collection ◽  
Chemical Sensors ◽  
In Situ Data
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