scholarly journals In-situ process control for semiconductor manufacturing

2002 ◽  
Author(s):  
J.H. Taylor ◽  
T.K. Whidden ◽  
Zhao Xiaozhong
Keyword(s):  
Process Control ◽  
Semiconductor Manufacturing

Process Control of Seeded Batch Cooling Crystallization of the Metastable α-Form Glycine Using an In-Situ ATR-FTIR Spectrometer and an In-Situ FBRM Particle Counter

2004 ◽  
Vol 4 (5) ◽  
pp. 949-953 ◽  
Author(s):  
Norihito Doki ◽  
Hiroya Seki ◽  
Kiyoteru Takano ◽  
Haruki Asatani ◽  
Masaaki Yokota ◽  
...  
Keyword(s):  
Process Control ◽  
Particle Counter ◽  
Cooling Crystallization ◽  
Ftir Spectrometer ◽  
Batch Cooling

In-situ photoluminescence imaging for passivation-layer etching process control for photovoltaics

2014 ◽  
Vol 105 (4) ◽  
pp. 043901 ◽  
Author(s):  
J. Z. Lee ◽  
L. Michaelson ◽  
K. Munoz ◽  
T. Tyson ◽  
A. Gallegos ◽  
...  
Keyword(s):  
Process Control ◽  
Passivation Layer ◽  
Etching Process

In situ UV monitoring of wastewater: a response to sample aging

2004 ◽  
Vol 49 (1) ◽  
pp. 47-52 ◽  
Author(s):  
E. Baurès ◽  
C. Berho ◽  
M.-F. Pouet ◽  
O. Thomas
Keyword(s):  
Low Temperature ◽  
Process Control ◽  
Treated Wastewater ◽  
Wastewater Sample ◽  
Line Measurement ◽  
Regulation Compliance

The phenomenon of wastewater sample aging is supposed to be treated with a low temperature autosampler. This work presents two examples of treated wastewater, the quality of which varies with the time of conservation. This evolution may pose some problems with respect to regulation compliance or process control. After the explanation of the mechanisms involved in sample aging, some recommendations are proposed in order to improve the UV off-line measurement of TSS and COD of treated wastewater.

New chalcogenide glass chemical sensors for S2- and dissolved H2S monitoring

2003 ◽  
Vol 47 (2) ◽  
pp. 135-140 ◽  
Author(s):  
M. Miloshova ◽  
D. Baltes ◽  
E. Bychkov
Keyword(s):  
Process Control ◽  
Chalcogenide Glass ◽  
Chemical Sensors ◽  
Industrial Process ◽  
In Situ Monitoring ◽  
Potential Hazard ◽  
Reliable Monitoring ◽  
Industrial Process Control ◽  
Monitoring Devices

A non-optimised treatment of wastewaters containing organic and biological substances is very often accompanied by an accidental emanation of hydrogen sulphide H2S and therefore leads (i) to an undesirable odour in the vicinity of water treatment plants, and (ii) to a potential hazard for the neighbouring population. Fast, sensitive and reliable monitoring devices are hence of significant importance. Chalcogenide and chalcohalide glasses are new promising membrane materials for detection of heavy metal ions and toxic anions and particularly well adapted for continuous in situ monitoring and industrial process control. In the present paper, we will discuss analytical characteristics of new chalcogenide glass chemical sensors for detection of S2− and dissolved H2S, which allow reliable process control to be carried out at natural pH of wastewaters.

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