Cleaning technology of PSM for sub-quarter-micron devices

1997 ◽  
Author(s):  
Hitoshi Handa ◽  
Masumi Takahashi ◽  
Yutaka Miyahara
Keyword(s):  
Cleaning Technology

scholarly journals Quality assessment of gas produced from different types of biomass pellets in gasification process

2019 ◽  
Vol 38 (2) ◽  
pp. 406-416 ◽  
Author(s):  
Marcel Mikeska ◽  
Jan Najser ◽  
Václav Peer ◽  
Jaroslav Frantík ◽  
Jan Kielar
Keyword(s):  
Gas Turbines ◽  
Combustion Engine ◽  
Calorific Value ◽  
Internal Combustion ◽  
Combustion Gas ◽  
Gas Cleaning ◽  
Gasification Process ◽  
Different Types ◽  
Before And After ◽  
Cleaning Technology

Gas from the gasification of pellets made from renewable sources of energy or from lower-quality fuels often contains a number of pollutants. This may cause technical difficulties during the gas use in internal combustion gas engines used for energy and heat cogeneration. Therefore, an adequate system of gas cleaning must be selected. In line with such requirements, this paper focuses on the characterization and comparison of gases produced from different types of biomass during gasification. The biomass tested was wood, straw, and hay pellets. The paper gives a detailed description and evaluation of the measurements from a fix-bed gasifier for the properties of the produced gases, raw fuels, tar composition, and its particle content before and after the cleaning process. The results of elemental composition, net calorific value, moisture, and ash content show that the cleaned gases are suitable for internal combustion engine-based cogeneration systems, but unsuitable for gas turbines, where a different cleaning technology would be needed.

Airborne pathogenic microorganisms and air cleaning technology development: A review

2021 ◽  
pp. 127429
Author(s):  
Lu Song ◽  
Jianfeng Zhou ◽  
Can Wang ◽  
Ge Meng ◽  
Yunfei Li ◽  
...  
Keyword(s):  
Technology Development ◽  
Pathogenic Microorganisms ◽  
Air Cleaning ◽  
Cleaning Technology

GAS-CLEANING TECHNOLOGY

2001 ◽  
pp. 1197-1316 ◽  
Author(s):  
PETRI SJOHOLM ◽  
DEREK B. INGHAM ◽  
MATTI LEHTIMAKI ◽  
LEENA PERTTU-ROIHA ◽  
HOWARD GOODFELLOW ◽  
...  
Keyword(s):  
Gas Cleaning ◽  
Cleaning Technology

scholarly journals INSUFFICIENT CLEANING TECHNOLOGY HIGH-MILLED WITH RECEIVING KOAGULIANT

2019 ◽  
Vol 0 (1) ◽  
pp. 67-73
Author(s):  
Яна Павлівна Крижановська ◽  
Микола Дмитрович Гомеля ◽  
Ярослав В’ячеславович Радовенчик
Keyword(s):  
Cleaning Technology

scholarly journals Competitiveness of the biomethane opposite with the CHP technology of biogas by definite plant size

2013 ◽  
pp. 5-9
Author(s):  
Ilona Barta-Juhász
Keyword(s):  
Heat Recovery ◽  
Waste Heat ◽  
District Heating ◽  
Cost Effective ◽  
Plant Size ◽  
Net Income ◽  
Renewable Energy Resources ◽  
Heating And Cooling ◽  
Emission Reduction Strategies ◽  
Cleaning Technology

The biogas sector has never before aroused so much attention as it does today. Combined heat and power (CHP) reliable and cost-effective technologies that are already making an important contribution to meeting global heat and electricity demand. Due to enhanced energy supply efficiency and utilisation of waste heat renewable energy resources, CHP, particularly together with district heating and cooling (DHC), is an important part of national and regional Green House Gas (GHG) emission reduction strategies. During my work I am going to use the basic data of a certain biogas plant than I assemble one model from that. Against the CHP technology I am going to plan a biogas cleaning-equipment. During my research it revealed, that in the case of a 1 MW output power plant it is not worthy to deal with biogas cleaning between national conditions. Investigating the quantity of heat recovery in the CHP technology it is obvious, that the net income at 1 m3 biogas is at least 72 times more than the cleaning technology (heat recovery is 0%).

Via Cleaning Technology for Post Etch Residues

2005 ◽  
Vol 103-104 ◽  
pp. 357-360
Author(s):  
B.G. Sharma ◽  
Chris Prindle
Keyword(s):  
Semiconductor Industry ◽  
Dielectric Materials ◽  
Copper Interconnects ◽  
Limiting Factor ◽  
Device Performance ◽  
Semiconductor Technology ◽  
Widespread Acceptance ◽  
Cleaning Technology ◽  
Rc Delay ◽  
Low K

Interconnect RC delay is the limiting factor for device performance in submicron semiconductor technology. Copper and low-k dielectric materials can reduce this delay and have gained widespread acceptance in the semiconductor industry. The presence of copper interconnects provides unprecedented challenges for via cleaning technology and requires the development of novel process chemistries for improved device capability.

Study on the Automatic Spraying System of Dust Suppressant and Speed Adaptive Algorithms

2014 ◽  
Vol 511-512 ◽  
pp. 691-695
Author(s):  
Shun Wei Wu
Keyword(s):  
Control Algorithm ◽  
Integrated Design ◽  
Management Control ◽  
Economic Losses ◽  
Hardware System ◽  
Secondary Pollution ◽  
System Maintenance ◽  
Cleaning Technology ◽  
Adaptive Pid Control ◽  
Control Layer

An automatic spraying system of dust suppressant is proposed in this paper for active control of uneven spraying, secondary pollution in the process of pipe cleaning and inconvenient system maintenance at present. The multilayer structure hardware system including monitoring management, control layer and field directors is designed. These deficiencies are improved by the way of adopting speed adaptive PID control algorithm, the integrated design of spraying mechanism and automatic cleaning technology. The key technology and algorithm are validated experimentally. The results show that the dust suppression proposed can be saved from 20% to 30% compared with traditional spraying system. The environmental pollution and economic losses to the enterprise will also be reduced effectively.

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