New optical imaging method for lithography and high-resolution inspections

1997 ◽  
Author(s):  
Alice Gheen ◽  
Y. Wang ◽  
ZhiJiang Wang
Keyword(s):  
High Resolution ◽  
Optical Imaging ◽  
Imaging Method

scholarly journals A NOVEL OF COMPARISON BETWEEN 3D HIGH DEFINITION MAPS CREATED BY PHOTOGRAMMETRY AND LASER SCANNING APPLIED FOR AN AUTONOMOUS VEHICLE

2021 ◽  
Vol 59 (3) ◽  
pp. 402
Author(s):  
Nang Xuan Ho
Keyword(s):  
High Resolution ◽  
Optical Imaging ◽  
Laser Scanning ◽  
Autonomous Vehicle ◽  
Mapping Method ◽  
Imaging Method ◽  
High Definition ◽  
Mathematical Algorithm ◽  
Advantages And Disadvantages ◽  
High Resolution Map

In this paper, based on the selected mathematical algorithm, the performing of two methods for building high-resolution 3D maps that are Photographmetry and Laser scanning was analyzed to find out the advantages and disadvantages of each one. The results showed that the high-resolution map constructed by using lidar was more accurate and detailed, whereas the map constructed by using images with coordinates was more intuitive. A mapping method using lidar-camera fusion was proposed in which the detailed roads are created by Lidar and the rest area built by optical imaging method.

VIS-NIR LED Illumination in Backside Circuit Edit and Optical Probing Applications

2012 ◽  
Author(s):  
Shida Tan ◽  
Richard H. Livengood ◽  
Dane Scott ◽  
Roy Hallstein ◽  
Pat Pardy ◽  
...  
Keyword(s):  
High Resolution ◽  
Image Quality ◽  
Optical Imaging ◽  
Narrow Band ◽  
Light Emitting Diode ◽  
Air Gap ◽  
Optical Image ◽  
Proof Of Concept ◽  
Light Emitting ◽  
Optical Probing

Abstract High resolution optical imaging is critical in assisting backside circuit edit (CE) and optical probing navigation. In this paper, we demonstrated improved optical image quality using VIS-NIR narrow band light emitting diode (LED) illumination in various FIB and optical probing platforms. The proof of concept was demonstrated with both common non-contact air gap lenses and solid immersion lenses (SIL).

scholarly journals A workflow for streamlined acquisition and correlation of serial regions of interest in array tomography

BMC Biology ◽  
2021 ◽  
Vol 19 (1) ◽  
Author(s):  
Sergio Gabarre ◽  
Frank Vernaillen ◽  
Pieter Baatsen ◽  
Katlijn Vints ◽  
Christopher Cawthorne ◽  
...  
Keyword(s):  
High Resolution ◽  
Light And Electron Microscopy ◽  
User Interaction ◽  
Regions Of Interest ◽  
Imaging Method ◽  
Array Tomography ◽  
Reference Space ◽  
Cell Processes ◽  
Electron Microscopes ◽  
Specific Tissue

Abstract Background Array tomography (AT) is a high-resolution imaging method to resolve fine details at the organelle level and has the advantage that it can provide 3D volumes to show the tissue context. AT can be carried out in a correlative way, combing light and electron microscopy (LM, EM) techniques. However, the correlation between modalities can be a challenge and delineating specific regions of interest in consecutive sections can be time-consuming. Integrated light and electron microscopes (iLEMs) offer the possibility to provide well-correlated images and may pose an ideal solution for correlative AT. Here, we report a workflow to automate navigation between regions of interest. Results We use a targeted approach that allows imaging specific tissue features, like organelles, cell processes, and nuclei at different scales to enable fast, directly correlated in situ AT using an integrated light and electron microscope (iLEM-AT). Our workflow is based on the detection of section boundaries on an initial transmitted light acquisition that serves as a reference space to compensate for changes in shape between sections, and we apply a stepwise refinement of localizations as the magnification increases from LM to EM. With minimal user interaction, this enables autonomous and speedy acquisition of regions containing cells and cellular organelles of interest correlated across different magnifications for LM and EM modalities, providing a more efficient way to obtain 3D images. We provide a proof of concept of our approach and the developed software tools using both Golgi neuronal impregnation staining and fluorescently labeled protein condensates in cells. Conclusions Our method facilitates tracing and reconstructing cellular structures over multiple sections, is targeted at high resolution ILEMs, and can be integrated into existing devices, both commercial and custom-built systems.

scholarly journals An optical imaging method to monitor stem cell migration in a model of immune-mediated arthritis

2009 ◽  
Vol 17 (26) ◽  
pp. 24403 ◽  
Author(s):  
Elizabeth J. Sutton ◽  
Sophie E. Boddington ◽  
Alexander J. Nedopil ◽  
Tobias D. Henning ◽  
Stavros G. Demos ◽  
...  
Keyword(s):  
Stem Cell ◽  
Cell Migration ◽  
Optical Imaging ◽  
Imaging Method ◽  
Stem Cell Migration ◽  
Immune Mediated

A Method of Dispersion Compensation Based on Warped Frequency Transform

2013 ◽  
Vol 718-720 ◽  
pp. 2062-2067 ◽  
Author(s):  
Shang Chen Fu ◽  
Zhen Jian Lv ◽  
Ding Ma ◽  
Li Hua Shi
Keyword(s):  
High Resolution ◽  
Velocity Dispersion ◽  
Lamb Waves ◽  
Group Velocity Dispersion ◽  
Dispersion Compensation ◽  
Imaging Method ◽  
Finite Element Software ◽  
Damage Imaging ◽  
Resolution Imaging ◽  
Multi Mode

The use of Lamb waves for structural health monitoring (SHM) has complicated by its multi-mode character and dispersion effect, which impacts the damage positioning and high-resolution imaging. The group velocity dispersion curves of Lamb waves can be employed to warp the frequency axis, and then to establish warped frequency transform (WFT) to process Lamb waves. In this paper, received signals are directly compensated with warped frequency transform to suppress dispersion, and a new imaging method is proposed based on warped frequency transform. The propagation of Lamb waves in damaged aluminum plate is simulated by finite element software ABAQUS, results show that warped frequency transform can effectively compensate dispersive wave-packets, and high-resolution damage imaging can be obtained by the proposed method.

Sign in / Sign up

Export Citation Format

Share Document