Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold
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1968 ◽
Vol 7
(10)
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pp. 1193-1201
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2001 ◽
Vol 47
(5)
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pp. 791-798
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1987 ◽
Vol 34
(6)
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pp. 1557-1563
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